Olympus AL120-6 Series, Operation Manual, Page: 49 / 80

Operation Manual Inspections
3-5
3-2-4 Back Macro Insp 2nd Back Macro Inspection
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* This function is available for the LMB model only.
1. Set a cassette on the cassette table.
2. Select the [Back Macro] and [2nd Back Macro] Observation buttons. ........................................................
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When the buttons are selected, the LEDs in the buttons light up.
If the [Back Macro] and [2nd Back Macro] LEDs are not lit, press the buttons to turn on the LEDs. If LEDs
for other types of inspection are lit, turn them off by pressing their buttons.
3. Confirm the detailed settings for inspection.
1) [Inspection Time]: Enables the setting of Macro inspection time. ..........................................................
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* The inspection time is common to the Top Macro, Back Macro and 2nd Back Macro inspections.
4. Set and confirm the inspection mode.
Select All or Sampling (P1 to P10). .............................................................................................................
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Set the inspection wafer number(s) as needed...........................................................................................
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5. Press the [Start] button to transfer the first wafer to the Back Macro inspection position. ..........................
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You can change the wafer tilt position (angle) for observation using the [Back Macro Tilt Angle] button....
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6. After the specified inspection time has elapsed, the wafer is placed on the macro table and rotated
counterclockwise about 20 degrees, and the loader then proceeds to the 2nd Back Macro inspection.
* Press the [Start] button if the [Inspection Time] control is set to [
∞
].
7. After the specified inspection time has elapsed, the wafer is unloaded into the cassette, and the second
wafer is transferred to the Back Macro inspection position.
Subsequent wafers are transferred automatically and sequentially.
8. After the last wafer is unloaded into the cassette, the operating units return to their initial positions and the
loader stops.
9. Replace the cassette with the next one, and repeat the procedure from step 1.
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