Olympus AL120-6 Series, Operation Manual, Page: 42 / 80

Outline of Operation Procedure Operation Manual
2-16
6 Temporarily Registering the Inspection Results: [Registration] Button
The [Macro]
c
and [Micro]
d
buttons are used to register defective
wafers. The registered wafers can be confirmed by pressing the
[Recall]
e
button after the inspection is completed.
You can also perform this operation using the remote
controller.
(1) How to register
c
d
Ref.
e
y
Press the [Macro]
c
button to register wafers under Top
Macro or Back Macro inspection. Press the [Micro]
d
button
to register wafers under Microscope inspection.
The buzzer sounds when registration is complete.
y
Wafers can be registered only during inspection but cannot be
registered during wafer transfer. If registration is needed, set
the inspection time to 1 second or longer. (The inspection time
setting function is not available for the L model.)
y
Two wafers at a time are transferred when the inspection
mode is All or Sampling (P1 to P10). Wafers on the
microscope cannot be registered after the specified inspection
time has elapsed. If registration is needed, set the inspection
time to
∞
.
(2) How to confirm
Page
y
After inspection is completed, press the menu button [M1]
<Recall> in the liquid crystal panel operating part or the
[Recall]
e
button in the operating panel. The liquid crystal
panel shows the registered data for each type of inspection.
<1> is displayed for the registered wafer number.
y
After confirmation, press the menu button [M1] <Exit> in the
liquid crystal panel operating part. The loader returns to the
initial screen and is ready for inspection.
Registered data remains in the memory until the main switch is
turned OFF or the next inspection is started.
AL120-LMB86-90 ALL
set the cassette
No |Size |Thick
|Comment
1. |200 |725-400 |
Recall Wafer Setting Memory
NG Wafer 0.OK 1.NG
1-10 11-20 20-26
1234567890 1234567890 123456
Macro 0000000000 0000000000 000000
Back
0000000000 0000000000 000000
Back2 0000000000 0000000000 000000
Micro 0000000000
0000000000 000000
Exit
Ref.