Olympus AL120-6 Series, Operation Manual, Page: 46 / 80

Inspections Operation Manual
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5. Set the vacuum stage to the wafer transfer position of the main unit.
If the vacuum stage has already been set in place, reset it or press the [Start] button................................
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6. The first wafer is transferred from the cassette. After the orientation flat alignment (when it is selected), the
wafer is transferred onto the vacuum stage.
Do not move the stage until the wafer has completely transferred onto the vacuum stage.
After the transfer is completed, the loader is able to perform the Microscope inspection of the first wafer.
7. The second wafer is transferred from the cassette. After the orientation flat alignment (when it is selected),
the wafer waits for inspection.
8. When the first wafer inspection is completed, the inspected wafer is replaced by the second wafer after
the vacuum stage is set to the wafer transfer position.
If the first wafer inspection has already been completed and the vacuum stage has been set to the wafer
transfer position before the second wafer is ready, reset the stage or press the [Start] button.
9. The first wafer is unloaded into the cassette.
10. The third wafer is transferred from the cassette. After the orientation flat alignment, the wafer waits for
inspection. Steps 7 to 9 are repeated to transfer subsequent wafers for inspection.
11. After the last wafer is unloaded into the cassette, the operating units return to their initial positions and the
loader stops.
12. Replace the cassette with the next one, and repeat the procedure from step 1.