Olympus AL120-6 Series, Operation Manual, Page: 68 / 80

Troubles and Countermeasures
/ When Warning Codes Are Displayed
Operation Manual
5-2
Page
Warning
Code No.
Causes and Solutions
Solution

Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.

[Note] To unload the wafer automatically, refer to 5-6 Automatic
Unloading.
W0007
Cause

A wafer has been left on the stage table during initialization.

The wafer is detected as a foreign object due to vacuum pressure being
too high.
Solution

Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.

[Note] To unload the wafer automatically, refer to 5-6 Automatic
Unloading.
W0008
Cause

A wafer protrudes from a cassette.
Solution

Insert the wafer fully into the cassette and press the [Start] button.
W0009
Cause

The specified slot already contains wafers.
Solution

Remove the wafers and press the [Start] button, or specify another slot to
unload wafers.
W0010
Cause

The size of the specified wafer and the wafer to be transferred do not
match.
Solution

Remove the wafers and press the [Start] button, or specify another slot to
unload wafers.
W0011
Cause

A wafer is improperly inserted into a slot inside a cassette; it is inserted
diagonally.
Solution

Insert the wafer by taking care that both edges of the wafer are in the
same slot, and press the [Start] button.
W0012
Cause

The thickness of a wafer is different from the standard thickness value.
Solution

Check to see if two wafers are inserted into the same slot or if the type of
the wafer to be inspected is different from the selected wafer type. If two
wafers are in the same slot, remove one and press the [Start] button. If the
selected wafer type is wrong, press the [Exit] button and
redo the wafer
type selection process.
If the loader is used at a low pressure (-53 KPa or lower) and with sudden changes in the
vacuum pressure, the loader may be unable to detect any wafers remaining in the transfer
path and may cause damage to the wafer(s).
If automatic unloading is performed in this state, the loader can not detect any remaining
wafers and may cause damage to them. Remove the wafer using tweezers or similar tools and
ensure that the cause is dealt with.
Automatic unloading may be unable to work. In this case, remove the wafer using tweezers or
similar tools and check the vacuum pressure before discharging again.
Ensure proper vacuum pressure and discharge when using the loader.
Caution