Olympus AL120-6 Series, Operation Manual, Page: 32 / 80

Outline of Operation Procedure Operation Manual
2-6
5 Setting the Inspection Mode
The following three inspection modes can be chosen.
Inspection mode button
d
c
y
All (100%) inspection
y
Sampling transfer P1 to P10 (Transfer pattern registration)
y
Sampling inspection L1 to L10 (Inspection pattern registration)
(1) All (100%) inspection:
Press the inspection mode button to turn on the [All] LED
c
.
(2) Sampling transfer P1 to P10 (Loading pattern registration):
1) Operation procedure
The loader can only transfer a wafer in the specified slot in
the cassette.
y
Press the inspection mode button until the desired pattern
number from P1 to P10 appears on the liquid crystal panel.
(The [Sampling] LED
d
lights up.)
The number increases incrementally from P1 to P10 each
time the up or down button of the 4-way button is pressed.
The number jumps from P1 to P5 and P5 to L1 as the right
or left button of the 4-way button is pressed.
y
The inspection sequence to be used is the one established
before the [Start] button is pressed.
y
Ten patterns can be registered in slots P1 to P10.
y
Two wafers are transferred at a time. (While one wafer is
under Micro inspection, the next wafer is transferred to the
Macro inspection position.)
2) How to register sampling loading patterns (P1 to P10)
y
Press the inspection mode button until the desired pattern
number from P1 to P10 is displayed on the liquid crystal
panel.
y
Press the [M3] <Setting> button to display the setting
registration screen.
y
Specify the number of the wafer to be selectively transferred
by using the Wafer No. selector button. (The LED in the
selected Wafer No. selector button lights up.) The button is
alternately selected and deselected each time it is pressed.
AL120-LMB86-90 P5
Set the cassette
No|Size|Thick |Comment
1.|200 |725-400 |
Recall Wafer Setting Memory
Inspection P5
1-10 11-20 20-26
1234567890 1234567890 123456
Wafer 0000000000 0000000000 000000
Exit Setting Memory
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