Olympus AL120-6 Series, Operation Manual, Page: 67 / 80

Operation Manual Troubles and Countermeasures/
When Warning Codes Are Displayed
5-1
Page
5
Problems during Use and Solutions
5-1 When Warning Codes Are Displayed
While not a malfunction, if the loader determines that there is the
possibility that normal wafer loading operations will be hindered, it issues
a warning code on the liquid crystal panel

, and halts operations.
In this event, take appropriate countermeasures listed below in the
Warning Codes before pressing the [Start] button again. The loader will
return to normal operation if the problem has been solved correctly.
Warning Codes
Warning
Code No.
Causes and Solutions
W0001
Cause

The cassette has not been set in the correct position.
Solution

Reset the cassette in the correct position and press the [Start] button.
W0002
Cause

The stage has not been set in the correct position.

The vacuum stage is not set after the inspection time has elapsed.
Solution

Reset the stage properly to the wafer transfer position.

[Note] Do not move the stage until the A-arm completes its up-and-down
movement. Make sure that the stage operation permission LED is lit
before moving the stage.
W0003
Cause

A foreign object (wafer) has been detected on the A1-arm.

The wafer is detected as a foreign object due to vacuum pressure being
too high.
Solution

Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.

[Note] To unload the wafer automatically, refer to 5-6 Automatic
Unloading.
W0004
Cause

A foreign object (wafer) has been detected on the A2-arm.

The wafer is detected as a foreign object due to vacuum pressure being
too high.
Solution

Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.

[Note] To unload the wafer automatically, refer to 5-6 Automatic
Unloading.
W0005
Cause

A foreign object (wafer) has been detected on the center (macro) table.

The wafer is detected as a foreign object due to vacuum pressure being
too high.
Solution

Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.

[Note] To unload the wafer automatically, refer to 5-6 Automatic
Unloading.
W0006 Cause

A wafer has been left in the Back Macro inspection position during
initialization.

The wafer is detected as a foreign object due to vacuum pressure being
too high.

Ｗ0001