Nikon NWL860 Series, Manual

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Chapter 4 Communications Specification
4
Message Variable
S1F3
S1F11
S1F23
SVID Format: 51
(1-byte integer)
Constant Format
7 = J/S Y Tilt value
SVNAME = J/S_Y
SV: Format 51 (1-byte integer)
0–255 (0: MIN, 255: MAX, 128: Neutral)
11 = Current Control State
SVNAME = CNT_ST
SV: Format 51 (1-byte integer)
0 = Offline
1 = Online Local
2 = Online Remote
Message Variable
S1F12 SVNAME A single line of characters: status variable name
See “5-47. SVID” above.
Format: 20
(ASCII)
Constant Format
5-48. SVNAME
Message Variable
S1F12
S2F30
UNITS Specifies the value unit.
Always shown as a blank for the NWL.
Format: 20
(ASCII)
Constant Format
5-49. UNITS
Message Variable
S6F11
S6F16
S6F20
V Variable data
See “5-51. VID” below.
Depends on VID.
Constant Format
5-50. V
Message Variable
S2F33 VID Variable ID
1 = All inspection results data for a carrier
V Format: 20 (ASCII)
Results of 26 wafers x 5 inspection items
[Wafer judgement (whether the wafers are
accepted on all items), Surface Macro, Back
Side Edge Macro, and Back Side Center
Macro]
Format: 51
(1-byte integer)
Constant Format
5-51. VID