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Chapter 4
Communications Specification
4
3. Functions Implemented in Communications with Host
and Scenario
This chapter complies with the SEMI E30-95 (GEM).
3-1.
Establishment of Communications
Notification that interrupted communications (power off or error) are restored. This notification may be
made by the host or by the equipment (NWL).
<Scenario>
○
Communications established from host
Message: S1F13,F14
<Comment>
[Host]
[Equipment] <Comment>
Communications state = ENABLE
Request to establish communications
S1F13
→
←
S1F14
Transmits COMMACK = 0 in reply.
Communications state = COMMUNICATING
○
Communications established from equipment
Message: S1F13,F14
<Comment>
[Host]
[Equipment] <Comment>
Communications state = ENABLE
←
S1F13
Requests to establish communications.
Acknowledges request to establish
S1F14
→
Transmits COMMACK = 0 in reply.
communications.
For scenarios involving time-outs and negative acknowledgements, refer to SEMI E30-4-1-5-2.
3-2.
Online Check
Checks the line or equipment status. The online check is performed by the host and used for periodic line
check (heart beat) by the host.
<Scenario>
○
Online check
Message: S1F1,F2
<Comment>
[Host]
[Equipment] <Comment>
Are You There?
S1F1
→
←
S1F2
Transmits MDLN,SOFTREV in reply.
3-3.
Sample File Management
3-3-1.
Sample File Uploading
The equipment transfers sample file data to the host for the host-selected PPID.
The equipment should not transmit a multi-block data send inquiry before sending the process
program.
The NWL transfers the sample files in multi-block data format.
Summary of Contents for NWL860 Series
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