Nikon NWL860 Series, Manual

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71
Chapter 4 Communications Specification
4
Message Variable
S7F23
S7F26
CCODE Format: 52
(2-byte integer)
Constant Format
115 = Back Side Center Macro tilt (VR-dependent/
independent)
PPARM Format: 52 (2-byte integer)
MSB of Upper Byte = 1: Set independent of
equipment VR setting
(The value of the PPARM lower byte is
used.)
MSB of Upper Byte = 0: The equipment VR
setting is used.
(The value of the PPARM lower byte is
ignored.)
Relation between lower byte and tilt
00H: (0°)–FFH: (160°)
116 = Protection attribute
PPARM Format: 51 (1-byte integer)
Permits or prohibits reading (restore) and
writing (store) of a sample file in operator
mode.
Bit 0: Always set to 1.
Bit 1: RESTORE
1: Prohibited 0: Permitted
Bit 2: STORE
1: Prohibited 0: Permitted
Bit 3–7: Always set to 0.
(Example): Prohibit both STORE and
RESTORE.
(MSB) (LSB)
0 0 0 0 0 1 1 1 B
117 = Use of orientation flat/Notch for unloading
PPARM Format: 51 (1-byte integer)
0 = Orientation flat/Notch is used.
1 = Orientation flat/Notch is not used.
Default = 0
[Carrier File Defining CCODE]
When the process program to be transmitted is a
carrier file, the entirety of the following CCODE for
carrier file definition must be transmitted.
202 = Carrier (wafer) size
PPARM Format: 44 (4-byte floating point)
150.0 = 6" wafer
200.0 = 8" wafer
203 = Maximum number of pockets
PPARM Format: 51 (1-byte integer)
25 = 25-pocket carrier
26 = 26-pocket carrier
204 = Pocket counting direction (does wafer
transfer start from the top or bottom of a
carrier?)
PPARM Format: 51 (1-byte integer)