Nikon NWL860 Series, Manual

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Chapter 4 Communications Specification
4
Message Variable
S1F2
S1F13
S1F14
S7F23
S7F26
SOFTREV Software revision code, 6 bytes maximum
ROM Version
V1.22: 122000
V1.22S1(custom-built): 122S01
Format: 20
(ASCII)
Constant Format
5-45. SOFTREV
Message Variable
S1F4 SV Status variable data
Value of status variable defined by SVID. See
“5-47. SVID” below.
Depends on SVID.
Constant Format
5-46. SV
Message Variable
S1F3
S1F11
S1F23
SVID Status variable ID
0 = Total number of inspected wafers
SVNAME = TOTAL
SV: Format 54 (4-byte integer)
1 = Rotation VR value
SVNAME = VOL_ROT
SV: Format 51 (1-byte integer)
0–255 (0: MIN, 255: MAX)
2 = Surface Macro X Tilt VR value
SVNAME = VOL_X
SV: Format 51 (1-byte integer)
0–255 (0: MIN, 255: MAX)
3 = Surface Macro Y Tilt VR value
SVNAME = VOL_Y
SV: Format 51 (1-byte integer)
0–255 (0: MIN, 255: MAX)
4 = Back Side Edge Tilt VR value
SVNAME = VOL_EDGE
SV: Format 51 (1-byte integer)
0–255 (0: MIN, 255: MAX)
5 = Back Side Center Tilt VR value
SVNAME = VOL_CNT
SV: Format 51 (1-byte integer)
0–255 (0: MIN, 255: MAX)
6 = J/S X Tilt value
SVNAME = J/S_X
SV: Format 51 (1-byte integer)
0–255 (0: MIN, 255: MAX, 128: Neutral)
Format: 51
(1-byte integer)
Constant Format
5-47. SVID