Nikon NWL860 Series, Manual

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Chapter 4 Communications Specification
4
Message Variable
S2F33 VID Format: 51
(1-byte integer)
Constant Format
3 = Result data for the preceding inspection item
V Format: 20 (ASCII)
Wafer number, inspection item, and results
are transmitted.
The meaning of the characters is the same
as for VID = 1 above.
(Meaning of Character)
The number sent first, 0–26:
Inspected wafer number
S: Surface Macro inspection
E: Back Side Edge Macro inspection
C: Back Side Center Macro
inspection
P: Surface programmable stop
inspection
M: Microscopic inspection
G: Accepted
N: Rejected
0–9: Reject type
(Example)
09M1
Wafer No. 9 is rejected on microscopic
inspections, with reject type 1.
4 = Mapping data
V Format: 20 (ASCII)
Wafer detection data
(Meaning of Character)
*: Wafer is in the pocket.
_: Wafer is not in the pocket.
(Example)
*****_ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _*_
Wafers No. 1, 2, 3, 4, 5, and 25 are
held in the carrier.
10 = Carrier Detection
V Format: 20 (ASCII)
0: Carrier is not installed.
1: 6" Carrier is installed.
2: 8" Carrier is installed.
?: Unknown
11 = Stage sensor status
V Format: 20 (ASCII)
1: ON
0: OFF
12 = Wafer sensor status
V Format: 20 (ASCII)
1 = ON (wafer sticks out)
0 = OFF
? = Unknown (A model with unknown
status (e.g. NWL860INX) is used.)