Nikon NWL860 Series, Manual

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67
Chapter 4 Communications Specification
4
Default ALID ALTX ALID
265 Buf OrFl pstn move T.O. *
266 Buf surf mac pstn move T.O. *
267 Buf BS mac pstn move T.O. *
274 Buf sec macX tilt err *
275 Buf sec macY tilt err *
287 OriFla detect err *
Confirm Carr data
299 BS cent mac snsr cant be ON *
305 BS cent mac ispct lwr limit T.O. *
306 BS cent mac ispct trnsfer T.O. *
315 V.S. err of BS cent mac (Stage) *
Confirm waf vacuum section setting
322 Change arm movement T.O. *
324 V.S. err of Change arm *
Confirm waf vacuum section setting
333 Chng arm sensor pstn not spcfd *
334 Chng arm uplmt snsr err *
335 Chng arm lwrlmt snsr err *
337 Chng arm slide sensorerr (buf) *
338 Chng arm slide sensorerr (stage) *
339 Chng arm sld pstn not spcfd *
Move Chang arm to sensor pstn
349 Feed armX home pstn move T.O. *
350 Feed armX wait pstn move T.O. *
352 Feed arm does not move out buf *
359 Feed arm pstn is not spcfd *
363 Feeder XorY hit the other unit *
364 V.S. err of Feed arm (Stage) *
Confirm waf vacuum section setting
368 Centering rangeX is exceeded *
Confirm carr pstn
369 Centering rangeY is exceeded *
Confirm carr pstn
370 Centering rangeXY is exceeded *
Confirm carr pstn
375 Incorrect carrier is set *
Confirm the specification
377 V.S. err of Stage *
Confirm waf vacuum section setting
378 System cant load wafer *
Default ALTX
379 System cant unload wafer *
380 Uplmt snsr of elvtr cant be OFF *
381 Uplmt snsr of elvtr cant be ON *
382 Lrlmt snsr of elvtr cant be OFF *
383 Lrlmt snsr of elvtr cant be ON *
386 Carr data error *
Confirm Carrier Data
387 System detected more than 3 waf *
Remove wafer
388 System does not prod a vacuum *
Confirm vacuum pres
389 Waf storage system does not work *
Remove wafer
393 Vacuum pres is not sufficient *
Confirm vacuum pres
395 V.S. err of Feed arm *
serch next wafer, push Skip key
396 Feeder arm timeout (Yaxis) *
397 Wafer was detected. *
Store wafer with Control Local
400 Feeder not in buffer when rise *
401 Feeder Z operation timeout *
402 Feeder Z hit the other unit *
403 Feeder arm Z not in position *
404 Feeder arm Z upper sensor OFF *
405 Feder arm Z lower sensor OFF *
406 SECS framing error *
Check the cable connection
407 SECS overrun error *
Check the cable connection
408 SECS break signal detected *
Check the cable connection
409 SECS communication lost *
Check the cable connection
410 SECS block timeout *
Check the cable connection
411 SECS undefined device ID *
Check the cable connection
412 SECS undefined stream *
Check the cable connection