66
Chapter 4
Communications Specification
4
Message
Variable
S5F3
ALED
Alarm enable/disable 1 byte
Bit 8 = 1 Enable alarm.
Bit 8 = 0 Disable alarm.
Format: 10
Constant
Format
5-6.
ALED
Message
Variable
S5F1
S5F3
S5F5
ALID
This ID is used to distinguish errors shown in the
error display screen from other errors.
It accompanies the ALTX of the related data item.
Format: 20 (ASCII)
Format: 52
(2-byte integer)
Constant
Format
5-7.
ALID
The text consists of two lines: error type and action, which are separated by NUL. If the text in the table
below has only one line, the error type is indicated. If so, the common action given below is applied.
If the default is marked by *, the error is factory-set for notification upon occurrence.
63
EEPROM checksum err
*
68
Incorrect ROM is used
*
69
EEPROM checksum err
*
166
Carr is not installed
*
Install carr
167
Waf not correctly set to carr
*
Set waf correctly
169
V.S. err of Stage
*
Confirm waf vacuum section setting
197
BScentmac ispct sec init err
*
Initialize by manual key
198
Feed armX init err
*
Move Feed arm to Buf side sensor pstn
199
Feed arm Y init err
*
Move Feed arm to Buf side sensor pstn
200
Chng arm init err
*
Initialize by manual key
201
Elvtr init err
*
Initialize by manual key
Default
ALID
ALTX
Reset the system.
Default
ALID
ALTX
202
Buf section init err
*
Initialize by manual key
223
Bad course algn (no centraliz)
*
229
Carrier Data err
*
Confirm Carr data
231
Waf srch err (hght, ptch)
*
236
Elevator sensor err
*
238
Elevator movement T.O.
*
240
Waf srch err (waf cen pstn det)
*
241
Waf srch err (bad waf cen pstn)
*
242
Waf srch err (waf not flat)
*
243
Waf srch err (waf not found)
*
244
Waf srch err (nospaceforfeedarm)
*
245
Waf srch err (AGC err)
*
262
OrFl ispct T.O.
*
263
V.S. err of Buf sec (Stage)
*
Confirm waf vacuum section setting
264
Buf lwr limit move T.O.
*
Summary of Contents for NWL860 Series
Page 1: ...M232 E 04 7 CF 3 Wafer Loader NWL860 Series IFC Function SECS Communications Specifications ...
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