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Chapter 4
Communications Specification
4
<Scenario>
○
Collection event occurs at equipment.
Message: S6F11,F12
<Comment>
[Host]
[Equipment] <Comment>
[IF]
The event report is multi-block data;
←
S6F5
[THEN] The equipment sends a multi-block data
send inquiry.
Grants multi-block data send inquiry.
S6F6
→
←
S6F11
Transmits event report.
Acknowledges event report.
S6F12
→
3-6-2.
Event Report Transmission Upon Request
The equipment transmits the event report requested by the host to the host.
The equipment does not send a multi-block data send inquiry before transmission, even if the
report is to be transmitted in multi-block data format.
<Scenario>
○
Event report request by host
Message: S6F15,F16
<Comment>
[Host]
[Equipment] <Comment>
Requests event report.
S6F15
→
←
S6F16
Transmits event report.
3-6-3.
Event Report Setting
①
The host defines the report (defines a data group as a report). (Single-block transmission)
②
The host links the above report to the collection event. (Single-block transmission)
③
The host defines the collection event as enabled or disabled. (Single-block transmission)
During communications with the NWL, the host can define up to eight (0–7) reports. One report
can contain up to five variable data.
The define reports must be transmitted in single-block data format.
<Scenario>
○
Collection event report setting
Message: S2F33,F34,F35,F36,F37,F38
<Comment>
[Host]
[Equipment] <Comment>
Defines report.
S2F33
→
Receives DATAIDs, RPTIDs, and VDSs.
←
S2F34
DRACK = 0, the report is OK.
Links the report to the event.
S2F35
→
Receives CEIDs and corresponding RPTIDs.
←
S2F36
LRACK = 0, acknowledges that the report is linked
to the event.
Enable the collection event.
S2F37
→
Receives CEIDs and corresponding RPTIDs.
←
S2F38
ERACK = 0, OK. The selected report is created
when the applicable event occurs.
Summary of Contents for NWL860 Series
Page 1: ...M232 E 04 7 CF 3 Wafer Loader NWL860 Series IFC Function SECS Communications Specifications ...
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