Nikon NWL860 Series, Manual

Page: 80 / 96

77
Chapter 4 Communications Specification
4
Message Variable
S2F30 ECDEF Equipment constant default
The default value of an equipment constant.
See ECV:DEFAULT in “5-21. ECID” below.
The format and code depend on the ECV.
Depends on ECID.
Constant Format
5-20. ECDEF
Message Variable
S2F13
S2F15
S2F29
S2F30
ECID Format: 51
(1-byte integer)
Constant Format
5-21. ECID
Equipment Constant ID
Identifies NWL setting items; used in
communications concerning retrieval, updates, and
changes to settings. The setting values are
indicated by ECV.
001 = Wafer search retry/skip
ECNAME = SET_SKIP_RETRY
ECV: Format 51 (1-byte integer)
0 = Skip
1 = Retry Default = 0
002 = Rejected wafer removal
ECNAME = SET_EJECT
ECV: Format 51 (1-byte integer)
0 = Not remove
1 = Remove Default = 0
003 = Orientation flat/Notch angle offset
(instrumental error adjustment range)
ECNAME = OFFSET_ROT
ECV: Format 44 (4-byte floating point)
Range: -45–45 (-45°–+45°)
Precision: 1° Default = 0
004 = Feeder offset (LOAD)
ECNAME = OFFSET_LOAD_FEEDER
ECV: Format 44 (4-byte floating point)
Range: -5.1403–7.9441
(-5.1403–+7.9441 mm)
Precision: 0.23365 mm Default = 0
005 = Feeder offset (UNLOAD)
ECNAME = OFFSET_UNLOAD_FEEDER
ECV: Format 44 (4-byte floating point)
Range: -8–8 (-8–+8 mm)
Precision: 0.23365 mm Default = 0
006 = Elevator downward travel for wafer transfer
(6-inch wafer)
ECNAME = ELV_DN_6
ECV: Format 44 (4-byte floating point)