Dressler 13150 400 V, User Manual

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HPG 13150 400 V (A) Installation, Setup, and Operation 5-23
HPG™ 13150 400 V RF Power Generator
Prerelease version
• Load power regulation, or delivered power regulation (P
real
)
In load power regulation, the HPG Generator regulates RF power with
constant load (real) power.
• External power regulation (DC Bias)
In external power regulation, the HPG Generator regulates RF power at a
constant DC self bias voltage in the chamber. The RF output power can
be limited to protect your plasma chamber against high RF power. This
limitation is useful if there is no self bias voltage in the beginning of the
process.
To Select a Regulation Mode Using the HPG Generator Front Panel:
1. Press the Program soft key.
2. Press Next until you see Control Settings on the display.
3. Press Change .
4. Press the soft key for the desired regulation mode: Control P
forward
,
Control P
real
, or Control DC Bias .
5. For P
forward
or P
real
regulation mode, set the desired power set point
between 0 W and 15 kW into a 50
Ω
nonreactive load using a combination
of the Increm Auto key and the RF POWER dial knob.
6. For DC Bias control, set a DC Bias value using a combination of the
Increm Auto key and the RF POWER dial knob.
4
The value can be between 0 V and 4000 V
Note: 4000 V is the default value. To change the default settings, see
“To Change the Default Device Configuration Settings Using the
HPG Generator Front Panel:” on page 5-34
7. Press Ok to confirm.
8. For DC Bias control, set a P
forward
maximum value between 60 W and 15
kW into a 50
Ω
nonreactive load using a combination of the Increm Auto
and the RF POWER dial knob.
9. Press Ok to confirm.
10. Press Exit .
11. Press Execute .
The operating screen will change to display the new control settings and
values.