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Instruction Manual

ZEISS Crossbeam 550L, Crossbeam 550

Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)

Содержание Crossbeam 550

Страница 1: ...Instruction Manual ZEISS Crossbeam 550L Crossbeam 550 Focused Ion Beam Scanning Electron Microscope FIB SEM...

Страница 2: ...e backup copies for archiving purposes shall remain unaffected thereby Any viola tions may be prosecuted as copyright infringements The use of general descriptive names registered names trademarks etc...

Страница 3: ...s 16 2 3 7 Mechanical Hazards 16 2 3 8 Radiation Hazards 17 2 3 9 Suffocation Hazards 17 2 4 Safety Equipment 18 2 4 1 Protective Cover Panels 18 2 4 2 Main Switch 19 2 4 3 Emergency Off EMO Option 19...

Страница 4: ...3 3 Measuring the Probe Current 80 6 3 4 Changing the Extractor Voltage 81 6 4 Working with Different Aperture Configurations and Beam Modes 81 6 4 1 Determining the Installed Aperture Configuration...

Страница 5: ...1 Lubricating the Rod 105 8 7 Focused Ion Beam 106 8 7 1 Checking the Lifetime of the Ion Source 106 8 7 2 Regenerating the Ion Source by Heating 106 8 7 3 Manually Finding a New Extractor Value 107 9...

Страница 6: ...hat a high beam energy is maintained throughout the entire column The beam booster technique has two main advan tages It minimizes beam widening that may occur due to stochastic electron electron inte...

Страница 7: ...ction that sweeps the focus of the objective lens backwards and forward through the focus on the specimen plane When the aperture is misaligned a lateral shift is observed FTP File Transfer Protocol G...

Страница 8: ...ates astigmatism lens aberra tion so that the electron beam becomes rotationally symmetrical Suppressor Electrode anode that suppresses un wanted thermionic emission from the shank of the Schottky fie...

Страница 9: ...esentatives Operation Contains information about starting the microscope and the software obtaining a first image adjusting important parameters and power ing down the microscope also in emergency Mai...

Страница 10: ...els of hazards and risks of personal injury and property damage Not only the safety instructions and warnings in the Safety chapter are to be considered but also the safety instructions and warnings i...

Страница 11: ...B Software Manual For detailed information on how to use the SmartFIB software for ion beam exposure refer to the SmartFIB software manual Instruction Manual for Options For detailed information regar...

Страница 12: ...l info microscopy de zeiss com Service Germany Phone 49 7364 20 3800 Fax 49 7364 20 3226 Email service microscopy de zeiss com Courses and training Email courses microscopy de zeiss com ZEISS Sales Se...

Страница 13: ...SEM Imaging or a focused ion beam FIB Imaging that is scanned across the speci men This application allows for the analysis of surface structures and near surface structures of ap propriate specimens...

Страница 14: ...r Personnel Deviating from the instructions given in this manual and on the safety labels can be hazardous or can lead to property damage Do not operate the microscope until you have completely read a...

Страница 15: ...hot during bakeout particu larly after a long bakeout cycle Do not place any combustible objects on the grids of the electron optical column during bake out After the bakeout procedure let surfaces c...

Страница 16: ...a high internal pressure of approximately 200 bar If not properly handled the contained gas can abruptly escape and cause the gas cylinder to move in an uncontrollable manner Observe all safety labels...

Страница 17: ...the accessible surface of the microscope does not exceed 1 Sv h A respective label is attached to the microscope Outside the EU the user of the microscope has to comply with the local regulations of...

Страница 18: ...ltages and X rays inside the microscope the microscope is equipped with protective cover panels 1 2 3 Fig 1 Protective cover panels 1 Electron optical column protective cover panels 2 Specimen chamber...

Страница 19: ...Off EMO Option With the Emergency Off EMO option the microscope is equipped with the following additional safety equipment Microscopes with SEMI certification must be equipped with the Emergency Off E...

Страница 20: ...the specimen chamber When this locking device is activated i e no electrical contact EHT Vac ready no is indi cated in the SmartSEM user interface EHT and SE detector voltages are blocked 2 4 4 2 Vac...

Страница 21: ...ctuating or inspecting an energy isolating device is not be exposed to serious risks must close off the connections to the corresponding media when needed must be lockable in their off position in ord...

Страница 22: ...ach safety label is af fixed close to the point where a particular hazard exists Several labels also provide legal informa tion Labels Attached to the Front Side of the Microscope 1 2 3 Labels Attache...

Страница 23: ...f the Plinth 7 9 8 Labels Attached to the CEE Connector 14 16 The safety labels always need to be attached to the correct spots at the microscope If a safety la bel is lost or unreadable it needs to b...

Страница 24: ...this product Reorder no 347800 0033 000 01en 4 At the rear of the electron optical column Contact may cause burn or electric shock Only authorised service Staff is allowed to service the equipment Di...

Страница 25: ...rns or severe frostbite Wear face eye and skin protection For relevant options Liquid nitrogen Contact with liquid or cold vapors can cause freeze burns or severe frostbite Wear face eye and skin prot...

Страница 26: ...057 000 Sigma 300 Order no 352100 9903 000 Sigma 500 Position and Figure of the Type Plate Description 13 At the rear of the microscope The Type plate contains a unique serial number the EVO model des...

Страница 27: ...31 2 Ion getter pumps IGPs for FIB 3 Ion sculptor focused ion beam FIB col umn Refer to Ion sculptor Focused Ion Beam FIB Column Optional 35 4 Specimen chamber with door handle 5 Plinth with ON STANDB...

Страница 28: ...is possible Refer to BSD Detector 46 and aBSD Detector 47 8 EsB detector for finest z resolution with out topographic artifacts and unique material contrast Refer to EsB Detector 45 9 Airlock with op...

Страница 29: ...re 4 Column chamber valve 5 Turbo pump 6 Ion getter pumps IGP 7 Specimen chamber 8 Penning gauge 9 Vent valve 10 Pre vacuum pump Operating Principle System Vacuum The pre vacuum pump 10 and the turbo...

Страница 30: ...mber valve closes and gaseous nitrogen flows into the specimen chamber via the vent valve 9 As soon as the pressure equilibrium is obtained the chamber door can be opened to change the specimen Evacua...

Страница 31: ...6 7 8 9 10 11 Fig 9 Schematics of the electron optics 1 Gun 2 Extractor Positive electrode that extracts electrons from the filament 3 Anode aperture 4 Upper condenser 5 Single hole aperture 6 Lower c...

Страница 32: ...ation 55 m 10 pA to 40 nA High resolution 100 nA high current configuration Anode aperture diameter Probe current Typical application 90 m 10 pA to 100 nA Combined high resolution and analytical inves...

Страница 33: ...e upper condenser 1 has a low excitation which is var ied in order to adjust the probe current in a limited range Electron interaction effects are minimized High spatial resolution is guaranteed Probe...

Страница 34: ...o navigate on a tilted specimen 1 2 3 4 Minimum Probe Current The characteristics and the beam paths of Minimum Probe Current mode and Normal mode are the same except the different operation of the gu...

Страница 35: ...r voltage Gallium is used up during operation Therefore the gallium emitter cartridge is a consumable The gallium emitter has to be regenerated by heating from time to time the heating procedure remov...

Страница 36: ...2 FIB imaging FIB Electron beam is blanked Ion beam is active The SE signal is synchronized to the FIB scan Channeling contrast imaging Voltage contrast imaging Defining milling patterns on the specim...

Страница 37: ...teral illumination emphasizes the topography of the specimen Backscattered Electrons BSEs Backscattered electrons BSEs emerge from below the surface of the specimen up to an order of m The number of e...

Страница 38: ...Surface structure SE Detector 40 SE2 Topography Optional Detectors Detected Signals Typical Application SESI Detector 44 SE2 Ions Channeling contrast crystal orientation Compositional contrast EsB De...

Страница 39: ...by the electrostatic lens This electrostatic field acts as acceleration field for the SEs generated on the specimen surface At the InLens SE detector the electrons hit a scintillator This generates a...

Страница 40: ...flashes of light and outputs a signal that can be used for imaging The collector voltage can be varied in the range between 250 V and 400 V A positive collector voltage generates an electrical field i...

Страница 41: ...selected depending on the imaging mode and the selected detectors White light limits the performance of most detectors Therefore infrared illumination is a fallback if white light cannot be used The p...

Страница 42: ...tilted stage in X Y direction no displacement moving out of focus occurs When a pre tilted specimen holder is used X Y movements require an adjustment of the Z position to stay in focus The stage can...

Страница 43: ...an emergency 3 M push buttons Controls a second Z axis M on super eucentric stages to set the eucentric point of the specimen tilt on these stages 4 X Y R joystick Controls the X and Y axes and the s...

Страница 44: ...g Principle Depending on the polarity of the collector voltage either electrons or ions scattered from the specimen 5 are attracted by a collector grid 4 and accelerated to the converter In the conver...

Страница 45: ...ctor right 1 EsB detector 2 Filtering grid 3 InLens SE detector Operating Principle A small amount of SEs pass through the hole of the InLens SE detector 3 and would be ob served by the EsB detector 1...

Страница 46: ...nation in TV mode infrared and white When you use a diode detector always make sure that the TV illumination is switched off If the CCD Mode is set to Auto Detect then the TV illumination is automatic...

Страница 47: ...or image generation Only electrons that have a high enough energy can create electron hole pairs and can contribute to image generation Electrons that have a lower energy e g secondary electrons are n...

Страница 48: ...latively large central hole and therefore has the advantage that it does not limit the field of view of the SEM and does not influence the electron optical properties of the objective lens A disadvant...

Страница 49: ...top left Segment S2 Material contrast and topography top right Segments S3 to S6 Pure topography bottom left For comparison Surface contrast seen with the InLens SE detector bottom right At small mag...

Страница 50: ...mm 4 Be careful when you tilt the specimen 3 3 1 5 aSTEM Detector Purpose The optional aSTEM annular Scanning Transmission Electron Microscopy detector consists of an electron detector underneath an u...

Страница 51: ...ws detection of four channels in parallel The aSTEM1 only collects one signal at a time S1 S2 S3 S4 S5 S3 S2 Fig 25 The aSTEM detector head and the arrangement of its diodes Operating Modes The most c...

Страница 52: ...with the primary electron beam Differences in crystal structure or the presence of impurities in a cathodo luminescent material result in variations in the energy gap between the filled valence bands...

Страница 53: ...3 Scan Rotate Rotates the scanning pattern 360 continuously This turning knob has a push button function to deactivate the scan rotate function and reset the scan rotation to 0 4 Shift X Shift Y Shift...

Страница 54: ...esume Exchange Starts the pre defined macro for specimen exchange with the airlock Resume Starts the pre defined macro to finish specimen exchange with the airlock 10 Camera Switches to chamber view 1...

Страница 55: ...out of the user interface 1 Title Bar Displays the name of the user interface and the logged on user 2 Menu Bar Enables you to access to SmartSEM features via sub menus 3 AVI Toolbar Contains the cont...

Страница 56: ...ed dialogs and to the recipe management 4 1 2 Graphical Control Elements The following graphical control elements are used in the SmartSEM GUI Screenshot Control El ement Function Tab Provides a group...

Страница 57: ...r User Access Level Description Novice Only the items assigned to the novice category are accessible These include most frequently used parameters Expert Items assigned to the novice and expert catego...

Страница 58: ...ables the user to initialize the motorized stage Supervisor Enables the user to perform the following actions Start the Administrator create and edit users Set User Max EHT Modify the filament current...

Страница 59: ...et the dimensions of the custom specimen holders Enables you to activate the available specimen holders for SmartSEM SEM Drift Correction Enables you to compensate for the drift of the specimen by usi...

Страница 60: ...Upgrade Scangen Firmware Service activities for ZEISS service representatives only Upgrade Server Database Service activities for ZEISS service representatives only Merlin Alignment Wizard Service ac...

Страница 61: ...nd mode switching 3 Working Area In the Working Area the following items are displayed Live Mode captured image and patterning elements Editing of patterning elements is possible only in Live Mode Sam...

Страница 62: ...ivate or deactivate a function Drop down list Enables you to select the desired element Radio button Enables you to activate the desired option Scroll bar Enables you to adjust a value by moving the s...

Страница 63: ...enu Programs SmartSEM Program Description SmartFIB Main tool for online live work on the microscope Milling etching deposition of patterning elements Provides the following modes Live Mode Mainly used...

Страница 64: ...t by an authorized ZEISS service represen tative An excerpt of the installation requirements can be found under Installation Requirements 114 For more details refer to the document Installation Requir...

Страница 65: ...ope has been de energized by turning the MAIN switch to the OFF position Alternatively the microscope has been de energized by pressing the Emergency Off EMO button 1 Verify that the main shut off val...

Страница 66: ...EM Server Log On dialog is displayed 3 Enter the user name and password 4 Click OK The SmartSEM user interface opens and is ready to operate the microscope 6 1 3 1 Calling up the Help There are differ...

Страница 67: ...ero SCROLL LOCK Toggles Freeze Unfreeze PAUSE Causes currently executing macro to continue Performs Find Image function CTRL 2 Loads Second Image Window from display CTRL A Switches Annotation panel O...

Страница 68: ...tre Point function 6 2 Obtaining a First Image Info Mobile phones in the microscope room can cause image quality infringements and in worst case workflow interruptions Purpose This section describes b...

Страница 69: ...mination caused by fingerprints Contamination caused by fingerprints can lead to vacuum deterioration or prolonged pumping times 4 Always wear lint free gloves when touching the specimen specimen hold...

Страница 70: ...ow Position Prerequisite The stage is initialized 1 In the Crossbeam SEM Control panel select the Imaging tab 2 In the Detector Active Channel section select TV from the Signal A drop down list The in...

Страница 71: ...mber door Fingers can be pinched when closing the chamber door 4 Use the door handle to close the chamber door 4 Ensure not to get your fingers caught in the chamber door gap NOTICE Risk of property d...

Страница 72: ...tely press F12 or press the Break push button of the dual joystick panel 4 Manually lower the stage before you open the chamber door Alternatively activate the Z move on Vent checkbox in the Stage tab...

Страница 73: ...tky field emitter If the Schottky field emitter is switched on and off too frequently or inappropriately its lifetime is reduced 4 Avoid switching off the gun during the working week 4 Use Standby mod...

Страница 74: ...hout the con trol panel You can also use the control panel to adjust aperture alignment magnification fo cus and brightness contrast Overview The procedure contains the following steps Selecting the C...

Страница 75: ...cation is set to Mag 500 x 6 2 6 5 Setting a Long Working Distance 1 In the Status Bar click The WD window is displayed 2 In the WD input field enter 10 3 Click OK The working distance is set to WD 10...

Страница 76: ...g Astigmatism 78 6 2 7 1 Adjusting the Magnification 1 To switch to the Fine mode in the Status Bar click The button changes to 2 Step by step raise the magnification up to Mag 50 000 x and focus in b...

Страница 77: ...s the acceleration voltage If the aperture is misaligned a lateral and vertical shift can be observed The Focus Wobble window is displayed 3 To adjust the wobble intensity use the Wobble Amplitude scr...

Страница 78: ...To obtain optimum results alternately correct focus and astigmatism 6 To deactivate the reduced raster in the Toolbar click the Reduced Raster Apertures icon 6 2 8 Saving the Image 1 In the Toolbar c...

Страница 79: ...is increased in comparison to the Normal gun mode This leads to a higher probe current Overall the probe current in Analytic gun mode is about twice the probe current in Normal gun mode The Analytic g...

Страница 80: ...overed by a small aperture If the beam is focused in this cavity no secondary elec trons and no backscattered electrons leave the Faraday cup Parts and Tools Designation Part no Faraday cup 348342 805...

Страница 81: ...required to change the extractor voltage 1 From the Menu Bar select Beam Gun Setup The Gun Service dialog is displayed 2 To increase the extractor voltage double click the Extractor V Target readout...

Страница 82: ...select the Control tab 2 In the Column section select between Normal and Overview 3 If required adjust the Depth of Field slider 6 5 Finding Appropriate Detector Settings 6 5 1 Selecting a Detector Yo...

Страница 83: ...good detection efficiency 10 kV 20 kV 2 5 mm Info Avoid strong specimen tilting for the InLens SE detector 1 In the Crossbeam SEM Control panel select the Imaging tab 2 From the Signal A drop down li...

Страница 84: ...gnal The BSE signal contains information about the material contrast In the final image heavy elements are repre sented by brighter pixels and light elements are represented by darker pixels By adjust...

Страница 85: ...ode FIB EHT Typical WD Collector Voltage 2 kV 30 kV Coincidence point Adjustable from 0 V to 1500 V Best detection 300 V to 400 V Settings when working in ion mode secondary ions imaging FIB mode FIB...

Страница 86: ...om right The following settings are recommended for the aBSD detector EHT Typical WD Detector Settings 0 5 30 kV 5 12 mm Compositional mode for obtaining an image that is high in atomic number contras...

Страница 87: ...SD Control panel click a quadrant symbol to toggle its status between on white inverted black and off gray 7 To choose the respective mode click BSD COMPO or BSD TOPO The default setting for BSD is BS...

Страница 88: ...ut signal in order to allow dif ferent STEM imaging modes e g bright field BF or oriented dark field ODF The most com monly used STEM imaging modes are predefined and can be selected from a drop down...

Страница 89: ...2 S3 ODF90 S3 S2 ODF BF S1 S2 S3 ODF90 BF S1 S2 S3 BF DF S1 S2 S3 ADF S2 S3 S4 HAADF Middle S4 HAADF outer S5 HAADF S4 S5 User defined name Custom combination of segments Active segments with signs Cu...

Страница 90: ...e selected zone 3 From the Signal A drop down list select a STEM detector e g aSTEM1 4 In the Panel Configuration Bar double click STEM Control To open the Panel Configuration Bar from the Menu Bar se...

Страница 91: ...inishing the Work Session NOTICE Risk of property damage Schottky field emitter If the Schottky field emitter is switched on and off too frequently or inappropriately its lifetime is reduced 4 Avoid s...

Страница 92: ...re fully deactivated the Off button lights up red permanently Computer electronic components and vacuum system are switched off The electron optical column is partially vented A 24 V auxiliary voltage...

Страница 93: ...secure the microscope against accidental re activation lock the energy isolating devices 6 7 Performing an Emergency Shutdown NOTICE Risk of property damage Components in the high voltage circuitry W...

Страница 94: ...ct the ZEISS service representative in time A list of ZEISS locations and authorized service partners can be found at http www zeiss com microscopy 7 3 Change of Consumables and Chemicals The change o...

Страница 95: ...tector As required approx 3000 Ah Ion source FIB apertures If used up Precursors 1 There is no warranty on field emission guns manufacturers do not guarantee any lifetime Tab 3 Schedule for the change...

Страница 96: ...nerated Refer to Regenerating the Ion Source by Heating 106 Ion source may be used up 3000 Ah Contact the ZEISS service representative to have the ion source replaced FIB No emission Ion source needs...

Страница 97: ...c ing Contact your local ZEISS service representative to have the field emission gun replaced Image is noisy and noise reduction methods do not help Field emission gun is used up Contact your local ZE...

Страница 98: ...anging the Joy stick TV Angle 100 Stage cannot be moved by using the joystick Joystick Disable checkbox is activated Deactivate the checkbox in the Stage tab of the Cross beam SEM Control panel Temper...

Страница 99: ...figuration Bar double click CAN Communication The CAN Communication window is displayed 2 If any of the values is indicated as Yes make sure that all cable connections between work station and PC are...

Страница 100: ...cope it can occur that dual joystick and stage seem to move to opposite directions This is because the selected CCD camera is installed at a certain angle relative to the stage Thus the camera shows a...

Страница 101: ...isk of property damage Contamination caused by fingerprints Contamination caused by fingerprints can lead to vacuum deterioration or prolonged pumping times 4 Always wear lint free gloves when touchin...

Страница 102: ...tching off the Gun 102 Starting the Bakeout 103 Switching on the Gun 73 8 4 1 1 Switching off the Gun Safety Information NOTICE Risk of property damage Schottky field emitter If the Schottky field emi...

Страница 103: ...t a bakeout cycle For 2 hours heating 1 5 hours cooling select Quick For 8 hours heating 1 5 hours cooling select Overnight For 43 hours heating 7 hours cooling select Weekend For a cycle defined by t...

Страница 104: ...hint for an electrical problem in the microscope 4 If a circuit breaker keeps tripping de energize the microscope completely and contact your ZEISS service representative for assistance No Value Circu...

Страница 105: ...nd soap CAUTION Risk of injury Isopropanol Isopropanol is highly flammable and irritating to the eyes Vapors may cause drowsiness and dizziness 4 Wear suitable gloves 4 Keep away from sources of ignit...

Страница 106: ...urce does not start emitting If the source is switched into Standby mode because the emission current exceeds the thresh old defined in the SmartSEM Administrator in the Go to Standby if emission exce...

Страница 107: ...FIB drop down list select FIB The FIB tab of the FIB Control Panel is displayed 2 Click Standby The FIB gun is set to Standby mode 3 To disable the suppressor regulation deactivate the Regulate checkb...

Страница 108: ...dy parts can be crushed 4 Maintain a safe distance 4 Do not walk or place your hands or feet under the load while it is being lowered 4 Wear safety shoes and gloves CAUTION Risk of injury or property...

Страница 109: ...Microscope plinth Wrapped with recyclable polyethylene foil and shipped in a reusable wooden crate Dimensions and weight of crate 1550 1550 2200 mm W D H appr 1300 kg Microscope console and accessori...

Страница 110: ...l Schottky field emitter Tungsten ceramics Used up emitters may be re turned to the emitter manu facturer Apertures Platinum iridium gold Very small amounts May be disposed of in accordance with local...

Страница 111: ...0 nA High Current configuration 10 pA to 100 nA Probe current regulation via a double condenser system Magnification Range 12x to 2 000 000x referenced to Polaroid image format Electron source Filamen...

Страница 112: ...metal ion source Ga LMIS Source Life 3000 hours at 1 A of emission current Isolation Automatically controlled valve for source isolation FIB resolution 3 nm at 30 kV Probe current 1 pA to 100 nA Magn...

Страница 113: ...nt monitor with integrated touch alarm audible touch alarm warning with on screen message Specimen mounts One carousel 9x specimen holder for 13 mm di ameter stubs included in base tool configuration...

Страница 114: ...chamber detector aSTEM detector optional Pneumatically retractable multi mode annular Scanning Transmission Electron Microscopy aSTEM detector enables bright field BF dark field DF and high angle ann...

Страница 115: ...nsport ways Free of staircases Installation cate gory II Floor stability 1000 kg m2 Parameter Requirement Installation site Exclusively inside buildings Recommended room size Min 3 6 m 5 0 m 2 3 m Ser...

Страница 116: ...ction to the main distribution panel Protection class Class I Nominal frequency 50 60 Hz Momentary inter ruption Less than a half cycle System connection The microscope is delivered with a power cord...

Страница 117: ...valid The building installation should provide the corresponding 200 250 VAC CEE FEMALE RECEPTACLE 2P3W 6h 16A blue with the correct wiring 1 N PE or 2 PE and the desired approvals of the country used...

Страница 118: ...ency 50 60 Hz Momentary inter ruption Less than a half cycle System connection The microscope is delivered with a power cord 3 m long equipped with a CEE plug 1 N PE according to IEC 60309 depending o...

Страница 119: ...erves as connection between the grounding screw terminal 8 mm and the microscope 6 mm Cross section Min AWG10 between grounding screw terminal and PE of the CEE FEMALE RECEPTACLE 2 Cooling Water Major...

Страница 120: ...d with the microscope Parameter Requirement Flow rate Approx 3 l min for ventilation of specimen chamber with chamber door open Pressure 0 2 3 3 bar Quality 4 6 with nitrogen content 99 996 Connection...

Страница 121: ...ty Less than 65 Altitude Max 2000 m above sea level to guarantee an undisturbed operation Pollution degree 2 Electrical field The microscope is a class A device industrial The microscope is de signed...

Страница 122: ...p to 10 Hz less than 5 m s 10 60 Hz less than 10 m s Above 60 Hz less than 14 m s Vertical vibrations in z direction Up to 10 Hz less than 4 m s 10 60 Hz less than 14 m s Above 60 Hz less than 20 m s...

Страница 123: ...53 dB for frequencies up to 200 Hz Less than 42 dB for frequencies from 200 up to 300 Hz Less than 50 dB for frequencies higher than 300 Hz Sigma 500 Less than 50 dB for frequencies up to 200 Hz Less...

Страница 124: ...m 200 up to 300 Hz Less than 50 dB for frequencies higher than 300 Hz 10 2 1 Layout and Connections A B C D E F G H I 1 2 3 4 1 Static vibration damper A Mains power supply 208 230 V 25 A L1 N L2 PE 2...

Страница 125: ...tion damper A Mains power supply 208 230 V max 16 A 2 Pre vacuum pump Equipotential bonding bar afety earth 3 Plinth and column Vacuum exhaust 4 Computer workplace Chilled water supply Dry compressed...

Страница 126: ...60 Hz 16 A 1 N PE 2 Pre vacuum pump Equipotential bonding bar grounding screw terminal 8 mm 3 Pre vacuum pump 2 optional Pressure reducer nitrogen 4 Computer workplace Main shut off valve 5 Emergency...

Страница 127: ...culptor FIB 200 mm airlock 2 Table PC 3 Static damping block 4 Pre vacuum pump 5 FIB rack Description Size mm appr Distribution of load kg Footprints Plinth column Ion sculptor FIB 940 1070 1800 4 250...

Страница 128: ...rints Plinth column Ion sculptor FIB 940 1070 1800 Crossbeam 550 940 1070 1880 Crossbeam 550 L 4 250 4 297 5 4 80 mm Plinth column Ion sculptor FIB 200 mm airlock 1080 1070 1800 Crossbeam 550 1080 107...

Страница 129: ...r design Risk assessment and risk reduction EN ISO 13849 1 2008 Safety of machinery Safety related parts of control systems Part 1 General principles for design EN 60204 1 2006 Safety of machinery Ele...

Страница 130: ...er gun by DENKA 000000 0302 460 Aperture single hole 35 m thin film 348520 0229 000 Anode aperture 55 m 40 nA High Resolu tion configuration 348520 0621 000 Anode aperture 90 m 100 nA High Current con...

Страница 131: ...red Parts Tools Part Number 1 5 mm Allen key 000000 0151 883 Small pliers Specimen holders Refer to specimen holder catalog Stubs Tweezers Lint free cloth Lint free gloves Instruction Manual ZEISS Cro...

Страница 132: ...BSD4 105 CL 52 91 EsB 45 84 Everhart Thornley 40 InLens SE 39 83 SE 40 83 SESI 44 85 STEM 88 Detector mechanics Lubricating the rod 105 Detector settings 83 Disposal 108 Microscope 110 Solid waste 110...

Страница 133: ...r seal 101 Requirements for personnel 14 Resetting the touch alarm 101 S Safe operation condition 14 Safety 13 Safety equipment 18 Safety label 22 Safety procedure 14 Saving images 78 Scintillator 94...

Страница 134: ...Temperature 102 Tool 131 Touch alarm reset 101 Transmitted electron 37 Troubleshooting 96 Type plate 25 26 U User access level 57 User interface 55 User privilege 57 V Vacuum system 29 134 Instructio...

Страница 135: ......

Страница 136: ...Promenade 10 07745 Jena Germany phone 49 1803 33 63 34 fax 49 3641 64 3439 info microscopy de zeiss com www zeiss com microscopy Instruction Manual ZEISS Crossbeam 550L Crossbeam 550 en US Rev 3 Modi...

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