Ulvac UTM300B, Инструкция по эксплуатации

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10
SECTION 2 IDENTIFICATION AND FUNCTION
2.4
Optional Accessories
2.4.1 Venting Valve
2.4.1.1 General Description
To maintain the cleanliness of your vacuum system, we recommend that you vent the pump
(or vacuum system) whenever you switch the turbo molecular pump off. Otherwise, oil mist on
the backing vacuum side spread to the turbo molecular pump or vacuum system. The venting
valve operates simultaneously with the turbo molecular pump. The venting valve opens 10
seconds (Note 1) after the STOP signal is input to turbo molecular pump. The venting valve
closes when a power failure occurs.
(Note 1) The time can be changed within the range of 0 to 30 seconds via RS-485
communication. Default setting of the delay time is 10 seconds.
2.4.1.2 Installation of Venting valve
Fig. 2-4 shows how the venting valve (P/N : 263-18796) is fitted to the pump.
Please connect nitrogen gas piping if necessary. In this case, you need to dismount the filter
of the venting valve. Connecting port of the valve is Rc1/8. The nitrogen gas pressure should be
20
±
10 kPaG.
Fig. 2-4 Installation of the venting valve