Ulvac UTM300B, Инструкция по эксплуатации

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8.6 Turbo Molecular Pump Return Request
8.6
Turbo Molecular Pump Return Request
Annual overhaul is recommended.
Overhaul, re-manufacturing, refurbishing, or repair of the turbo molecular pump system should
always be performed by ULVAC or an approved service company.
The following precautions are required before forwarding the turbo molecular pump to
ULVAC or an approved service company for all service related requests.
(1) The turbo molecular pump must be void of all process gases. Turbo molecular pumps that
were operated in applications using special gases (doping gas, epitaxial gas, film forming
gas, etching gas, etc.), likely have the process by-products, reaction-produced matter, etc.
Remove them from the turbo molecular pump by repeated gas purge to the pump and fill
the pump with an inert gas. The pump interior must be adequately purged with inert gas
before uninstalling from the unit.
(2) The customer is required to submit MSDS (Material Safety Data Sheet) sheets and
information of all gases, materials, etc. that have been associated with the turbo molecular
pump.
(A copy of this from is printed at the end of this manuals "Certificate of Decontamination ".)
ULVAC will accept and perform service only on turbo molecular pumps that have been
properly prepared as stated in (1) and (2) above. ULVAC will advice the customer of any
failure precaution/prevention procedures that are appropriate to each individual turbo molecular
pump service request.
Please pack it surely so as not to damage it by the impact, the vibration, and the high
temperature and humidity environment, etc. from the outside when the pump is returned.
Please use the packing materials used when it ships it from our company or the packing
materials of quality more than equal to it.
CAUTION