Ulvac UTM300B, Инструкция по эксплуатации

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9.3 Nothing Happens After an Operation is Made
9.3
Nothing Happens After an Operation is Made
Table 9-1 Nothing Happens After an Operation is Made
PROBLEM POSSIBLE CAUSES CORRECTIVE ACTION Section
1 Input the power, but the
turbo molecular pump
fails to operate. The GND pin (7, 15)
and
the 24 VDC pin (1, 5)
are
not connected to power
supply correctly. Ensure that the GND pin (7, 15)
and the 24 VDC pin (1, 5) are
connected to power supply
correctly. 5.2
Electrical power
outside
power supply unit’s
power range. Operate within power supply
unit’s power range. 4.1
2 START/STOP button is
pushed but turbo
molecular pump does
not accelerate. In REMOTE mode
(POWER lamp lights) By maintained push the RESET
button, change to LOCAL mode
(POWER lamp blinks) 6.2
Other causes. Check the ALARM lamp is not
lights. If an alarm is indicated,
correct the malfunction and reset
alarm. 9.5
3 Remote "START" signal
active but the turbo
molecular pump does
not accelerate. In LOCAL mode
(POWER lamp blinks) By maintained push the RESET
button, change to REMOTE mode
(POWER lamp lights) 6.2
Other problems. Check the ALARM lamp is not
ON. If an alarm is indicated,
correct the malfunction and reset. 9.5
4 START/STOP button is
pushed but the turbo
molecular pump does
not coast. In REMOTE mode
(POWER lamp lights) By maintained push the RESET
button, change to LOCAL mode
(POWER lamp blinks) 6.2
5 Remote "STOP" signal
activated but the turbo
molecular pump does
not coast. In LOCAL mode
(POWER lamp blinks) By maintained push the RESET
button, change to REMOTE mode
(POWER lamp lights) 6.2