Ulvac UTM300B, Инструкция по эксплуатации

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8.2 Turbo Molecular Pump Decontamination
8.2
Turbo Molecular Pump Decontamination
All expenses incurred with the decontamination of the turbo molecular pump are the
responsibility of the customer.
8.3
Bearing Replacement
The ball bearing (Fig. 3-1 (6)) and the touch-down bearing are the component of this pump that
is subjected to friction and wear.
The replacement of (the ball bearing and) the touch-down bearing is done only by ULVAC
or an approved service company.
Recommended bearing exchange period depends on mounting direction and gas load.
Table 8-1 Recommended bearing exchange period
Gas load Mounting direction
Bearing exchange
period
No
Vertical (Note 1) 4 years
Directions other than
vertical direction
3.5 years
Yes Any direction 2 years
(Note 1) Vertical directions is within
±
5
°
.
(Note 2) It is recommended period and is not an exchange period to be guarantee.
8.4
Check of the rotor blades
Rotor blades of turbo molecular pump are high-speed rotor made of aluminum alloy. It has the
possibility that material strength deteriorates, specially when corrosive gas is evacuated. Regular
check (Customer is liable for the cost.) by ULVAC or a ULVAC approved/authorized service
center is suggested. (Every 1 year is recommended.) ULVAC and/or the service center
investigate rotor blades in every overhaul task and check and suggest a rotor replacement to
customers if any cracks are found out.