Ulvac UTM300B, Инструкция по эксплуатации

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5.1 Installation
5.1.2 Installation of the Pump
To ensure safety, do not operate the pump.
・
The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown
torque should be generated when abnormality occurs in the pump by any chance. Incidental
accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by
insufficient method.
・
Fix the pump to host equipment according to 5.1.2.2. The method to fix the pump is different
depending on the pump model and the size of inlet flange of the pump.
・
Host equipment should be fixed to the floor so as not to move. Host equipment should be
designed to have enough margins in strength, in preparation for an emergency accident.
Avoid to install the pump at the following places.
(1) Place where the pump is inevitably exposed to significant vibration and impact.
(2) Unstable place.
(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.
The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock /
impact to it during transportation. This pump is not an explosion-proof product. This pump is not
intended to be used in a potentially explosive atmosphere. Do not use flammable gas and
explosive gas.
Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without
fail. Avoid direct touch with them. Internal contamination of the vacuum chamber or the pump
would cause deterioration of adequate vacuuming performance.
When using a hydraulic rotary pump with vibration of wide amplitude, as a backing vacuum
pump, undertake proper anti-vibration measure. (As a guideline, control the vibration to 0.1G/50
Hz max at the outlet connection port of the turbo molecular pump.)
This pump is a precision pump. To protect the pump from torsion due to external piping load,
use a bellows joint or a flexible tube to either the pump inlet or outlet, without fail.
WARNING
CAUTION
NOTICE