Ulvac UTM300B, Инструкция по эксплуатации

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A-15
A5 COMMAND DESCRIPTION
A5.2 Operation
Commands
RT
START Operation
The turbo molecular pump starts accelerating and sends the "Acceleration Start"
answer.
RP
STOP Operation
The turbo molecular pump starts coasting and sends the "Coasting" answer.
RR
RESET Operation
This command is effective against failures. This command resets the ALARM. If the
cause of the alarm is eliminated after resetting, the “Failure Elimination” answer will
be returned.
Answers
RA
Acceleration Start
This answer is returned after the acceleration is started on a START operation.
RB
Deceleration Start
This answer is not used for UTM300B.
RU
Coasting Start
This answer is returned after the coasting is started on a STOP operation.
RC
Failure elimination
This answer is returned if the failure cause is removed and send RESET operation
command.
RF
Failure Occurrence
This answer is returned if the failure cause is not removed and send RESET
operation command. The alarm code of the failure that has not been eliminated is
returned as a 2-character sub-command.
RV
Operation invalid
This answer is returned if the operation is invalid (START operation command sent
during acceleration) or if the operation mode differs from the port that sent the
command (operation mode is RS-485 but operation command was sent from the
RS-232C port).