A-11
A4
TABLE OF COMMANDS
Table A-6
Alarm History 1 Data Format
Item
Number
of bytes
Data Comments
1
History number
2
01 ~ 99
History number designated by the command.
2 Time
10
YYMMDDHHMM
Time when the failure occurred (stored as
Greenwich Mean Time)
YY : year, MM : month, DD : day,
HH : hour, MM : minutes
3
Alarm number
2
00 ~ 99
Alarm number of the failure that occurred.
Refer to Table 9-6 "Table of Alarms" and
Table 9-7 "Table of Warnings".
4 Run
status
2
NS,SA,NN…
Run status when the failure occurred.
Data is identical to CS command answer.
5
Rotational speed
4
0000 ~ 0100
Speed when the failure occurred.
Format is identical to 09 in Table A-4.
6
Motor current
4
0000 ~ 0150
Motor current in the event of a fault.
Format is the same as No.04 in Table A-4.
7
Reserved
6
000000 ~999999
This byte is not used for UTM300B.
8
Reserved
4
0000 ~ 0100
This byte is not used for UTM300B.
9
Reserved
4
0000 ~ 0100
This byte is not used for UTM300B.
10 Reserved
4
0000 ~ 0100
This byte is not used for UTM300B.
11 Reserved
4
0000 ~ 0100
This byte is not used for UTM300B.
12 Reserved
4
0000 ~ 0100
This byte is not used for UTM300B.
13 Reserved
4
0000 ~ 0100
This byte is not used for UTM300B.
14 Reserved
4
0000 ~ 0100
This byte is not used for UTM300B.
15 Operation time
6
000000 ~ 099999
Operation time when a fault occurs.
Format is the same as No.01 in Table A-5.
Содержание UTM300B
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Страница 30: ...CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Control system 3...
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Страница 70: ...GAS PURGE 7...
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