Ulvac UTM300B, Инструкция по эксплуатации

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9.5 Alarm Detection Capabilities
9.5
Alarm Detection Capabilities
The fault detection functions shown in Table 9-6 "Table of Alarms" and Table 9-7 "Table of
Warnings" are incorporated for protection in the event of a problem with the turbo molecular
pump or controller.
When an error is detected, check the ALARM lamp (Fig. 2-2 (5)) and refer to Section 9.5.3 for
the appropriate remedy.
9.5.1 Movement in Alarm Detection Capabilities (ALARM)
1. ALARM lamp (Fig. 2-2 (5)) lights.
2. The logic interface "ALARM" signal turn on.
3. The pump start the protective operations shown in Table 9-6 "Table of Alarms".
9.5.2 Movement in Alarm Detection Capabilities (WARNING)
1. ALARM lamp (Fig. 2-2 (5)) flashes.
2. The logic interface "WARNING" signal turn on.
3. Pump operation continues.
9.5.3 Reset Procedure
1. Refer to the Troubleshooting information and eliminate the cause of the problem.
2. Conduct the reset operation.
3. (ALARM) If the problem has been eliminated, the ALARM lamp (Fig. 2-2 (5)) goes out, the
"ALARM" logic interface signals turn off after an alarm was given, the pump rotor coasts.
(WARNING) When the problem is eliminated after a warning occurred, pump operation
continues.
4. If the problem was not completely eliminated, the alarm is not cancelled.