Ulvac UTM300B, Инструкция по эксплуатации

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66
SECTION 9 TROUBLESHOOTING
Table 9-4 If the ALARM Lamp Lights
Alarm
Code
Alarm Name Possible Cause Remedy
Sec-
tion
1
15 POWER FAILURE
Power failure Wait for the power to be restored.
Reduction in the
power suppluy
voltage Check the 24 VDC power supply.
2
16 TMP:OVERLOAD Drop in rotation
speed during rotation
at rated speed
(increased internal
pump pressure). Check that the outlet and inlet pressures
are
below the specified maximum pressures.
Check for leakage.
Check that too much purge gas is not
flowing.
Check that process gas flow rate is not too
high. 4.1
3
21 TMP:TEMP/MB CABLE Increased pump drive
motor temperature. Check that the ambient temperature around
the pump is within the specified range.
Check that no load in excess of the
specified range is continuously applied to
the pump.
In the case of forced air cooling
spcefication, check that the cooling fan is
operating. Remove a object obstructing the
fan operation. 4.1
26 TMP:BRG TEMP Increased pump
bearing temperature
4
43 EI:PARAM ERROR Stored parameters
are not correct. Turn the power on again after the pump
stops. The power supply unit must be
repaired if the problem occurs again.
44 EI:CPU ERROR Error in the CPU for
inverter control
5
46
47 MOTOR OVERSPEED
EI:R-SPEED ERROR Rotation detection
signal from the motor
cannot be detected
correctly. Check that equipment causing noise is not
used around the pump and the power
supply unit. 5.2
6
23
24 EI:MOTOR OVERCURR
EI:INV OVERCURR Overcurrent supplied
to the motor. Check that the ambient temperature around
the pump is within the specified range. 4.1
7
30 EI:CONT.TEMP ERR Temperature
increase in the control
system. Check that the ambient temperature around
the pump is within the specified range.
In the case of forced air cooling
spcefication, check that the cooling fan is
operating. Remove a object obstructing the
fan operation. 4.1
8
35 EI:INV. OVERVOLT Increased the 24
VDC power supply. Check the 24 VDC power supply.
36 EI:DC-DC LOW VOLT Decreased the 24
VDC power supply.
9
48 EI:ACCEL OVERTIME Rotation speed does
not increase at startup. Check that the outlet and inlet pressures
are
not too high.
Check for leakage.
Check that too much purge gas is not
flowing.
The time to detect this alarm can be
changed via RS-485 communication. 6.2
10
49 TMP:CAN NOT START Pump does not
rotate. Adhesion of reaction products or damage to
the protective bearing is the possible cause.
Remove the pump from the unit and check
that the rotor blades rotate smoothly at the
inlet. An overhaul is required if blades do
not rotate smoothly.