Ulvac CR16B, Инструкция по эксплуатации

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YK16-0010-DI-002-02
7.4 Trouble shooting
Table. 8 Trouble check list
Trouble Causes Processing method
Pump does not start
even ON/OFF switch is
on.
Power is not supplied Supply power
Wrong power connector wiring
Correctly make wiring connection
(Refer to 3.3.1 Power supply wiring)
Supplied voltage is low Measure of supply voltage
The supplied remote connector is
wired incorrectly.
Correctly make wiring connection
(Refer to 3.3.2 Wiring for remote
control)
Electric leak in the pump.
Contact service center. To be repaired
by ULVAC.
Pump does not start by
remote operation.
ON/OFF switch is not turned on. Turned on the ON/OFF switch.
Failure of instrumentation device.
Contact service center. To be repaired
by ULVAC.
Alarm lamp is lit, pump
stops or does not start
Blockage of outlet piping and/or
clogged valve.
Checking of outlet piping.
The temperature abnormality caused
by poor ventilation around the pump.
Stop by the high-temperature anomaly
Check for blockage of ventilation
opening
Check temperature of the surrounding
environment (Refer to 0.5.3 Ambient
Condition for Storage, Install and
Operation)
Waits 511 seconds ON / OFF switch
ON state at power on. Then, alarm
reset by remote I / O or turn OFF the
ON / OFF switch.
About 3 seconds or more of the
primary power supply Cut-off, power
failure, voltage drop.
※
When the power supply restored
before capacitor discharge in the alarm
detection state hold.
Check of the state of the primary supply
side power.
Do not perform run / stop by on / off of
the primary power supply.(Refer to 4.2
Run)
Rotation disabled by foreign substance
and/or deposition in the pump.
Contact service center. To be repaired
by ULVAC.
Mechanical or electrical failure of the
pump.
Pressure does not
drop.
Insufficient
ultimate pressure.
Pump evacuation capacity is smaller
compared to vacuum chamber volume. Select another pump.
(Refer to 5. Pump Performance)
Pressure measurement method is
wrong.
Measure pressure correctly.
Vacuum gauge is not appropriate.
Use the vacuum gauge that matches the
measurement pressure range and correctly
calibrated to measure pressure.
Leakage of inlet port. Leak-test for inlet piping.
Clogging inlet strainer. Cleaning of inlet piping.
Reduction of pumping
speed.
Leakage at inlet port side. Leak-test for inlet piping.
Clogged inlet strainer. Cleaning of inlet piping.
Abnormal sound.
Panel is vibrating.
Contact service center. To be repaired
by ULVAC.
Oil deterioration. Oil shortage.
Deposition into pump.
Mechanical failure of the pump.
Backing pressure rise.
Check the exhaust pipe.
Leakage at inlet port. Check the piping and stop leak.