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YK16-0010-DI-002-02
0. Before Using This Product
We thank you very much for purchasing our product.
You are kindly requested, upon delivery of the product, to check that the delivered product is exactly
what you have ordered and it has no damage caused by transport or the like.
This manual gives description on operation and maintenance procedure appropriate to use the product
in safe and effective way. Please read this manual beforehand to correctly use the Pump.
You are requested to install and operate the product in compliance with the laws and regulations relating
to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on in the country and region you
use the product. Consequently you shall be requested to attend general safety lectures officially
effective in the area, such as electrical safety, Cargo handling safety and so on. Note that any person not
attended such lectures shall be restricted from handling the product. Operators shall need to attend
such kind of training and have special knowledge, skill and title regarding the electricity, machinery,
cargo, vacuum and so on.
This product is designed to conform to regulations valid at the time of issue of this manual and its
conformity is not ensured if any of regulations shall be changed in the future.
The performance and safety of the product might not be ensured if any of the devices put together did
not conform to same regulations or the product itself was modified. ULVAC shall be not liable to
guarantee performance and safety in such cases above. Any modification of the product by the user is
out of the scope of guarantee by us and not be guaranteed in any manner.
Be sure to clear any energy sources, e.g. electricity, coolant and so on of the product before installing or
removing the product.
Please note that any of the parts used in this product shall keep the performance at the time of the
shipment but shall not survive eternally. Any of the parts cannot, under any application supposed under
socially-accepted idea, help but inevitably deteriorate its performance and get easily result in causing
trouble of the product. You are kindly requested consequently to take your application situation into
consideration and help yourself to implement the protective maintenance so as to avoid troubles.
Through implementation of the protective maintenance, you shall reduce occurrence of the trouble due
to wear and/or failure of the part and bring reducing the occurrence of the downtime caused by the
product trouble and fire as well as a risk of affecting the another process.
We would like to ask you again to establish the protective maintenance plan as well as conduct the part
replacement and overhaul in accordance with such a plan.
Please do not hesitate to contact our sales office or agency closest to you or the Components Division if
you had any question or unclear on the use.
Author's copyright of this instruction manual belongs to Components Division
of ULVAC, Inc. It is prohibited to copy a part and/or this entire manual without
authorization by Components Division of ULVAC, Inc.
CAUTION
Содержание CR16B
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Страница 63: ...6 YK16 0010 DI 002 02 2 5 Outline dimensional drawing Fig 2 CR60B Outline dimensional drawing ...