Ulvac CR16B, Инструкция по эксплуатации

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10
YK16-0010-DI-002-02
3.2.2 Piping for exhaust side
Remove cap from outlet flange. Maximum outlet pressure of this pump is atmosphere pressure.
Excessive pressure exerted on the pump causes failure. Open full of the valve if valve is installed in
the exhaust side
Connect to the exhaust duct from the outlet of the pump if intake gas contains moisture. Protect the
environment surrounding the pump.
Fig. 4 Typical pump layout
Do not run the Pump on blocking the exhaust outlet or putting any device that
might hamper gas passage onto the outlet. There is a risk that the pressure
inside the vacuum pump rises up and it causes break or oil leak of the casing
or oil level gauge resulting in overload of the motor.
CAUTION
(1) Be sure to use electricity-conducting material for the duct piping. Should
you used non electricity-conducting material, static electricity would be
generated under passage of exhaust gas, generate the charged spark and
cause a fire.
(2) In the case of the process flowing combustible gas/susceptibility of
substances to burn gas, you are requested to introduce the dilution gas.
Flow the dilution gas from the intake side so that the gas concentration to
be exhausted becomes lower than the explosion limit.
(3) If thin metal piping, bellows or the likes are used, the pulsing stream of
gas in piping may produce pipe resonance, and the sound could exceed
the work environment sound criteria if the piping, bellows or the like are
made with thin metal wall. Use piping with adequate thickness and
pressure proof.
CAUTION