Ulvac CR16B Скачать руководство пользователя

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Contents-2

YK16-0010-DI-002-02

4.2.2 Remote operation ....................................................................................................................... 18

4.3 Check points and adjustments after starting .................................................................................... 18

4.4 Operation Stop .................................................................................................................................. 19

5. Pump Performance ................................................................................................................................. 20

6. Dismantling ............................................................................................................................................. 21

6.1 Power Supply Wiring ........................................................................................................................ 21

6.2 Inlet and outlet piping........................................................................................................................ 21

6.3 Nitrogen gas piping (if connected) .................................................................................................... 21

7. Maintenance ........................................................................................................................................... 22

7.1 Check ................................................................................................................................................ 22

7.2 Checkup after storage for a long period ........................................................................................... 22

7.3 Overhaul ........................................................................................................................................... 22

7.4 Trouble shooting ............................................................................................................................... 23

8. Disposal .................................................................................................................................................. 24

9. Warranty Clauses ................................................................................................................................... 24

9.1 Warrantable Items............................................................................................................................. 24

9.2 Warranty period ................................................................................................................................ 24

9.3 Warrantee scope .............................................................................................................................. 24

9.4 Response procedure ........................................................................................................................ 25

9.5 Others ............................................................................................................................................... 25

Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination