Ulvac CR16B, Инструкция по эксплуатации

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Contents-1
YK16-0010-DI-002-02
Table of Contents
INSTRUCTION MANUAL ...................................................................................................................... 1
0. Before Using This Product .......................................................................................................................... i
0.1 Safety Symbol Marks ........................................................................................................................... ii
0.2 Meanings of Safety Symbol Marks ...................................................................................................... ii
0.3 Safety Precautions.............................................................................................................................. iii
0.4 Types and Descriptions of Warning Labels Displayed on this Pump and Displayed Positions......... vii
0.5 Acceptance and Storage of the Pump .............................................................................................. viii
0.5.1 Unpacking/Acceptance of the Pump .......................................................................................... viii
0.5.2 Transfer ........................................................................................................................................ ix
0.5.3 Ambient Condition for Storage, Install and Operation .................................................................. ix
1. For Your Safety Use ................................................................................................................................. 1
1.1 This Product Intrinsic Hazardous Nature and Safety Measures......................................................... 1
1.1.1 Danger Leakage of dangerous gas and dangerous materials ........................................ 1
1.1.2 Warning Transfer of heavy material ................................................................................. 1
1.1.3 Warning Electric shock .................................................................................................... 2
1.1.4 Caution High temperature................................................................................................ 2
1.2 Chemical Material Safety Data Sheet （ SDS ） ...................................................................................... 3
2. Pump Outline ............................................................................................................................................ 4
2.1 Features .............................................................................................................................................. 4
2.2 Application .......................................................................................................................................... 4
2.3 Principle of pumping ........................................................................................................................... 4
2.4 Performance Specifications ................................................................................................................ 5
2.5 Outline dimensional drawing .............................................................................................................. 6
2.6 Name and description of each part ..................................................................................................... 7
3. Mounting ................................................................................................................................................... 8
3.1 Installation ........................................................................................................................................... 8
3.2 Piping .................................................................................................................................................. 9
3.2.1 Piping for inlet side ....................................................................................................................... 9
3.2.2 Piping for exhaust side ............................................................................................................... 10
3.2.3 Gas ballast valve ......................................................................................................................... 11
3.3 Electrical Connection ........................................................................................................................ 14
3.3.1 Power supply wiring ................................................................................................................... 14
3.3.2 Wiring for remote control ............................................................................................................ 16
4. Operation ................................................................................................................................................ 17
4.1 Check points and Preparations before Operation ............................................................................ 17
4.2 Operation Start .................................................................................................................................. 17
4.2.1 Local operation ........................................................................................................................... 18