Ulvac CR16B, Инструкция по эксплуатации

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YK16-0010-DI-002-02
6. Dismantling
6.1 Power Supply Wiring
1) Make lockout and tag-out according to the instruction manual of MCCB (Molded Case
Circuit Breaker).
2) Make sure that power has been disconnected by using a tester, etc or secondary utility
conducting indicator in your side.
3) Be sure to separate the Pump from power after removing power connector.
6.2 Inlet and outlet piping
6.3 Nitrogen gas piping (if connected)
Remove nitrogen gas piping from gas ballast gas port.
Be sure to cut off the electricity before starting dismantling operation.
WARNING
(1) Take off the piping following the Install Manual of the Pump.
(2) Inlet piping remains very hot wile after having stopped the Pump. Be sure
to take it off after the Pump has sufficiently cooled down.
(3) Make the Pump exhaust outlet airtight completely with a blank flange.
WARNING
(1) Before removing nitrogen gas piping, close supply valve of the nitrogen
gas.
(2) Your side piping leaves residual pressure. Be sure to take nitrogen gas
piping off after confirming pressure is reduced to atmosphere pressure by
a pressure gage installed to your side nitrogen supply source (in the
middle of the piping to the Pump).
WARNING
Install and operate the product in compliance with the laws and regulations
relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so
on. In the country and region you use the product.
CAUTION