Ulvac CR16B, Инструкция по эксплуатации

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YK16-0010-DI-002-02
It is an option NC (Normally closed) type solenoid valve driven by DC24V. Will become possibility to
remotely open and close, by wiring refer to the following specifications.
Fig. 8 Explanatory diagram of method for solenoid valve wiring
Install R1/4 tube fittings by removing plug of gas ballast gas port, if N2 purge necessary. Connect to
tube fitting the 1/4 inch tube.
Set N2 supply pressure at less than 50 kPaG and flow rate at 10~20 SLM.
Fig. 9 Recommended system of N2 purge gas piping
(1) Add pressure reducing valve for adjusting the pressure of the nitrogen gas
supply and supplying valve to stop N2 supply.
(2) Before removing nitrogen gas piping, close supply valve for nitrogen gas.
CAUTION