Olympus AL120-6 Series, Руководство по эксплуатации, Страница: 74 / 80

Troubles and Countermeasures
/ Automatic Unloading
Operation Manual
5-8
Page
5-6 Automatic Unloading
When the power is cut off with a wafer left in the transfer path in events
such as an emergency halt, power failure, or occurrence of error, the
wafer left in the transfer path can be unloaded automatically into the
cassette following the procedure given below ( 5-6 1 to 4 ) or can be
removed using tweezers.
If the wafer loader judges that wafers cannot be automatically unloaded,
error No. E1005 (the position of the wafer is out of the allowable range) or
No. 0111,0211,0311,0511 (the wafer is at a position where initialization is
impossible) is displayed on the liquid crystal panel

.
In this case, turn the main switch OFF and unload the wafer into the
cassette using tweezers or similar tools

When using the automatic unloading procedure after a warning or
error has occurred, remove the cause of the warning or error
before attempting automatic unloading. If automatic unloading is
done before the cause is removed, it may cause damage to the
wafers. If the cause is unknown, unload the wafers into the
cassette using tweezers or similar tools, and then turn on the
loader.

Make sure that there are no wafers in the specified slot before
using the automatic unloading procedure.

Your loader may have been set to skip initialization when the power
is turned on. Press the [Start] button to initialize the loader, and
then follow the automatic unloading procedure.

E1005
OFF