Olympus AL120-6 Series, Руководство по эксплуатации, Страница: 33 / 80

Operation Manual Outline of Operation Procedure
2-7
y
After the setting is completed, press the [M4] <Memory>
button. A buzzer sounds to indicate that registration is
complete.
y
Press the [M1] <Exit.> Button to exit the setting registration
screen.
(3) Sampling inspection patterns (L1 to L10)
1) Operation procedure
The loader can inspect only a wafer in the specified slot in
the cassette according to a specified inspection sequence.
y
Press the inspection mode button to display the pattern
number (L1 to L10) that you want to register on the liquid
crystal panel.
(The [Sampling] LED
d
lights up.)
The number increases incrementally from P1 to P10 each
time the up or down button of the 4-way button is pressed.
The number jumps from P1 to P5 and P5 to L1 as the right
or left button of the 4-way button is pressed.
y
Ten patterns can be registered in slots L1 to L10.
y
One wafer is transferred at a time.
2) How to register sampling inspection patterns (L1 to L10)
y
Press the inspection mode button to display the pattern
number (L1 to L10) that you want to register on the liquid
crystal panel.
y
Press the [M3] <Setting> button to display the setting
registration screen.
y
Specify the number of a wafer to be subjected to sampling
inspection with the [Wafer No.] button. The selected Wafer
No. selector button will blink. Specify the inspection
sequence for the selected wafer number and the LED in
the selected inspection sequence button lights up. (The
inspection sequence button is alternately selected and
deselected each time it is pressed.)
y
If you want to register other wafer numbers, specify the
wafer numbers and the inspection sequence by using the
[Wafer No.] buttons in the same way as described above.
The [Wafer No.] buttons are on for the numbers of wafers
whose inspection sequences are already specified.
AL120-LMB86-90 L1
set the cassette
No |Size |Thick
|Comment
1. |200 |725-400 |
Recall Wafer
Setting Memory
1-10 11-20 20-26
1234567890 1234567890 123456
Macro 0000000000 0000000000 000000
Back 0000000000 0000000000 000000
Back2 0000000000 0000000000 000000
Micro 0000000000 0000000000 000000
Exit Setting Memory
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