Olympus AL120-6 Series, Руководство по эксплуатации, Страница: 47 / 80

Operation Manual Inspections
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3-2-2 Top Macro Inspection
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1. Set a cassette on the cassette table.
2. Make sure that only the [Top Macro] LED in the Observation button is lit...................................................
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If the [Top Macro] LED is not lit, press the button to turn on the LED. If LEDs for other types of inspection
are lit, turn them off by pressing their buttons.
3. Confirm the detailed settings for inspection.
1) [Inspection Time]: Enables the setting of Macro inspection time. ..........................................................
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2) [Top Macro spin direction]: Enables the setting of wafer rotation direction during the Top Macro
inspection...............................................................................................................................................
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3) [Top Macro spin speed]: Enables the setting of wafer rotation speed during the Top Macro inspection.
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4. Set and confirm the inspection mode.
Select All or Sampling (P1 to P10). .............................................................................................................
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Set the inspection wafer number(s) as needed...........................................................................................
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5. Press the [Start] button, and the first wafer is transferred to the Top Macro inspection position.................
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You can change the wafer tilt direction for observation using the joystick.
Release the lock ring before using the joystick.
6. After the specified inspection time has elapsed, the wafer is unloaded into the cassette, and the second
wafer is transferred to the Top Macro inspection position.
* Press the [Start] button if the [Inspection Time] control is set to [
∞
].
7. Subsequent wafers are transferred automatically and sequentially.
8. After the last wafer is unloaded into the cassette, the operating units return to their initial positions and the
loader stops.
9. Replace the cassette with the next one, and repeat the procedure from step 1.
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