Olympus AL120-6 Series, Руководство по эксплуатации, Страница: 51 / 80

Operation Manual Inspections
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* Wafers are not transferred onto the microscope if the stage is not in the wafer transfer position at the time
of wafer transfer.
* By setting the vacuum stage to the wafer transfer position during Top Macro inspection, Top Macro
observation is terminated before the inspection time is completed. Microscope inspection is given
preference and the wafer is transferred onto the vacuum table.
* If Microscope inspection is not required, press the [Unload] button. The first wafer is unloaded into the
cassette and the second wafer is transferred to the Top Macro inspection position.
7. Subsequent wafers are transferred automatically and sequentially.
8. After the last wafer is unloaded into the cassette, the operating units return to their initial positions and the
loader stops.
9. Replace the cassette with the next one, and repeat the procedure from step 1.