Olympus AL120-6 Series, Руководство по эксплуатации, Страница: 29 / 80

Operation Manual Outline of Operation Procedure
2-3
2-1 Procedure before Starting Transfer
Preparation
Make sure that there are no wafers in the transfer path or on the vacuum stage.
If any wafer is in the transfer path, return the wafer to the cassette using tweezers or the like.
1 Turning the Main Switch ON: Main Switch
Turn the main switch
c
ON.
At this time the units return to their initial positions if they are in other
positions. (This is called initialization).
If the vacuum stage is not in the proper transfer position, the warning
code W0002 is displayed. Set the vacuum stage in the transfer
position.
c
2 Cassette Setting
Set the cassette along a cassette guide suitable for the cassette size.
c
200mm wafer cassette guide
d
150mm wafer cassette guide
e
200mm and 150mm wafer common cassette guide
Page
y
Set the cassette carefully to prevent wafers from
popping out.
y
If a deformed cassette is used, there is a risk that
wafers could get damaged. When setting a
cassette in position, make sure that you check to
see if the cassette rattles due to deformation.
y
We take no responsibility for the breakage of
wafers or any other problems in setting the
cassette.
e
c
d