Olympus AL120-6 Series, Руководство по эксплуатации, Страница: 19 / 80

Operation Manual
Table of Contents
C-1
Page
1 Nomenclature 1-1
1-1 Wafer Loader Main Body································································ 1-
１
1-2 Operation Panel ···············································································1-2
1-3 Remote Controller (Option) ····························································1-3
1-4 Vacuum Stage ··················································································1-4
2 Outline of Operation Procedures 2-1
1 Description of Symbols 2-1
2 Operation Procedure 2-1
2-1 Procedure before Starting Transfer ···············································2-3
Preparation 2-3
1 Turning the Main Switch ON: Main Switch 2-3
2 Cassette Setting 2-3
3 Selecting the Type of Inspection Wafer: 4-way button 2-4
4 Setting the Sequence (Inspection Type: [Observation] Button 2-5
5 Setting the Inspection Mode 2-6
6 Selecting Wafers for Inspection: Wafer No. Selector Button 2-8
7 Setting the Orientation Flat and Notch Positions on the Microscope: [Wafer
alignment] Position Control 2-9
8 Setting the Inspection Time: [Inspection Time] Control 2-9
9 Detailed Settings for the Top Macro Inspection: [Top macro spin direction] and
[Top macro spin speed] Controls 2-9
10 Setting Wafer Alignment when Unloading a Wafer 2-10
2-2 Vacuum Stage ················································································2-12
1 How to Move the Vacuum Stage 2-12
2 How to Use the Grip Handle 2-12
3 How to Use the Wafer Rotating Knob 2-12
2-3 Start of Transfer ·············································································2-13
1 Start of Transfer: [Start] Button 2-13
2 Status of the Loader in Operation 2-13
3 Top Macro Inspection 2-14
4 Back Macro Inspection and 2nd Back Macro Inspection: Setting the Back Macro
Tilt Angle 2-14
5 Transferring a Wafer onto the Vacuum Stage 2-15
6 Temporarily Registering the Inspection Results: [Registration] Button 2-16