
Operation Manual
Troubles and Countermeasures
/ How to Reset the Circuit Breaker
5-7
Page
5-3 How to Reset the Circuit Breaker
1)
Turn the main switch OFF, disconnect the power cord on the
back side of the loader, and press the reset button
(protruding part) of the circuit breaker that has tripped.
2)
After the circuit breaker switch returns to the normal position,
connect the power cord to AC Line again.
3)
Turn the main switch ON and check that the loader operates
normally.
When the circuit breaker has tripped, disconnect the power cord immediately
and remove the cause.
5-4 After use of Loader Stop
When the Loader Stop switch is pressed, the loader stops operations
immediately.
Turn the main switch OFF, disconnect the power cord on the back side of
the Loader, remove the cause of the loader stop, and then turn the main
switch back ON.
If any wafers remain in the loader, check the transfer safety. If there are
no problems with transfer, refer to
5-6 Automatic Unloading
.
5-5 Power Failure
Wafers on transfer arms remain held by the vacuum when the power
supply is cut in events such as blackouts. If there are no wafers in the
transfer path of the loader, turn the main switch OFF then turn it back ON.
If there are any wafers in the transfer path, turn the main switch OFF and
refer to
5-6 Automatic Unloading
.
Содержание AL120-6 Series
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