Olympus AL120-6 Series, Руководство по эксплуатации, Страница: 39 / 80

Operation Manual Outline of Operation Procedure
2-13
2-3 Start of Transfer
1 Start of Transfer: [Start] Button
Press the [Start]
c
button to start inspection.
c
Ref.
y
You can also start inspection using the remote controller.
y
Inspection starts when the stage is set to the wafer transfer
position, even if the Microscope operation is not selected.
* This function can be disabled by changing the setting.
y
The loader may have been set to start inspection only after the
type of inspection wafer is specified.
2 Status of the Loader in Operation
The status of the loader is indicated by LED lighting.
Page
y
“In operation”: Lit green to indicate that the loader is in operation.
y
“Warning”: Lit yellow to indicate a warning.
y
“Error”: Lit red and with a buzzer to indicate that an error has
occurred.
LED display
The liquid crystal panel
c
shows the following information.
c
M02 S01
No |Size |Thick
|Comment
1. |200 |725-400 |
E0101
Beep OFF
y
When the loader is in operation: The panel shows the number of
the wafer currently inspected in each inspection position.
On the macro (center) table <M**>
On the vacuum stage <S**>
y
When a warning has occurred: The panel shows the warning code
number.
y
When an error has occurred: The panel shows the error code
number.
You can silence the buzzer by pressing [M1] <OFF>.