
Operation/Maintenance Manual
Introduction/
Conformity Standards
i-13
Page
6. Conformity Standards
(1) This equipment is carrying out conformity or evaluation to the following standard.
(2) Although this equipment aims at using in the industrial environment, since it may not satisfy
a performance when not used by the right operation method, please carry out the proper
handling according to this manual.
FCC
This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant
to Part 15 of the FCC rules. These limits are designed to provide reasonable protection against harmful
interference when the equipment is operated in a commercial environment. This equipment generates,
use, and can radiate radio frequency energy and, if not installed and used in accordance with the
instruction manual, may cause harmful interference to radio communications.
Operation of this equipment in a residential area is likely to cause harmful interference in which case
the user will be required to correct the interference at his own expense.
SEMI
This equipment is carrying out evaluation to the guideline of the following SEMI standard.
S2-0706: Safety Guidelines for Semiconductor Manufacturing Equipment
S8-0308: Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
This equipment is an object for industrial environment (Class A). Other equipment
may be affected if it is used in a housing environment.
FCC WARNING:
Changes or modifications not expressly approved by the party responsible for
compliance could void the user's authority to operate the equipment.
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