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6-7
Chapter 6. Communication Data
*4. Device status bits (addresses 1209 to 1212)
These bits are used for errors, alarms, warnings, and information.
Bit No.
Item
Description
0
Zero point adjustment diagnosis
0: OFF. 1: ON
1
SP is being limited
0: OFF. 1: ON
2
Valve overheat prevention limit
0: OFF. 1: ON
3
Flow rate warning
0: OFF. 1: ON
4
Undefined (normally 0)
–
5
User-defined settings error
0: OFF. 1: ON
6
Communication protocol error
0: OFF. 1: ON
7
Flow rate control error
0: OFF. 1: ON
8
Watchdog time-out
0: OFF. 1: ON
9
Valve error
0: OFF. 1: ON
10
Sensor module error
0: OFF. 1: ON
11
Parameter mismatch
0: OFF. 1: ON
12
Parameter error
0: OFF. 1: ON
13
Hardware error
0: OFF. 1: ON
14
Programmable ROM error
0: OFF. 1: ON
15
Run-time error
0: OFF. 1: ON
Handling Precautions
•
Digital Mass Flow Controller Model F4Q User's Manual
, CP-SP-1461E
(for details of each status)
Data related to the instantaneous flow rate setpoint
Item
Data range
/ [unit]
Data address
Decimal
(hexadecimal)
R
W
Notes
Flow rate setpoint (SP-0)
(0 to 100 % FS)*
2
1401 (0579)
✓
✓
The value is without a decimal
point.*
1
Flow rate setpoint (SP-1)
Same as above
1402 (057A)
✓
✓
Flow rate setpoint (SP-2)
Same as above
1403 (057B)
✓
✓
Flow rate setpoint (SP-3)
Same as above
1404 (057C)
✓
✓
Flow rate setpoint (SP-4)
Same as above
1405 (057D)
✓
✓
Flow rate setpoint (SP-5)
Same as above
1406 (057E)
✓
✓
Flow rate setpoint (SP-6)
Same as above
1407 (057F)
✓
✓
Flow rate setpoint (SP-7)
Same as above
1408 (0580)
✓
✓
*1. For the number of decimal places and the unit of data, see “Flow rate digits after the decimal point” (address 1003) and
“Flow rate unit” (address 1005).
Ex.: If the flow rate digits after the decimal point is set to “1” and the flow rate unit is set to “0” (mL/min), the value “1234”
means 123.4 mL/min.
*2. The setting range is the full scale flow rate (address 1002) multiplied by the percentage in parentheses. (The setting
range varies depending on model and gas type.)
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