Ulvac MS120A, Instruction Manual

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YO20-0938-DI-001-00
5.3 Overhaul
Periodic overhaul perform is recommended.
Overhauls are necessary to maintain the performance (including safety) as well as to ensure the planned
level of productivity.
Perform an overhaul once a year.
Perform an overhaul once a year.
In addition, an overhaul is recommended when this machine's performance
degraded significantly or it has been contaminated by the usage, even when less
than a year has passed since the previous overhaul.
Note that when performing an overhaul, it is necessary to replace at least the
parts described in "Appendix: Major Replacement Parts."
For overhauls, contact your local ULVAC Service center. When requesting overhaul, maintenance, repair,
or other work, fill out the Declaration of Contamination attached to this document and submit it to the
service center.
If details on the dangerous substances in use is not disclosed or if difficult-to-detoxify substances are
exhausted, the Service center may refuse to perform maintenance or other operations.
5.4 Notes on Transportation
This product is a precision machine that incorporates precision machinery components and electronic
components inside. Application of a strong impact or continuous vibration may cause a malfunction.
Therefore, n transportation, please use a means of transportation which have vibration-proof function (an
air suspension truck, for example).
Especially for long-distance overland transportation under poor road surface conditions, it is recommended
to transport to the installation site under the same packing condition as when it was shipped from ULVAC.
If it is left in a high temperature and high humidity environment for a long time, it may cause a malfunction
due to corrosion of mechanical parts or performance deterioration of electrical parts. Transport and store in
an appropriate environment.