Ulvac MS120A, Instruction Manual

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YO20-0938-DI-001-00
4.2 Preparation for Operation
4.2.1 Pre-Operation Check
Before operating this machine, reconfirm the following.
1 ．
Make sure that the cooling water pipe, power connector, and signal connector are connected.
2 ．
Open the cooling water valve and check that there is no cooling water leakage.
3 ．
When supplying purge gas, connect the purge gas pipe and then supply purge gas.
Check that there is no leakage of purge gas.
4 ．
Supply power to the primary side.
4.2.2 How to switch between LOCAL (manual) and REMOTE (remote)
Entering operation commands from the controller is called LOCAL.
Entering operation commands from a sequence of higher-level devices via remote control wiring is called
REMOTE.
1 ．
Turn on the power.
The initial screen appears.
2
．
Press on the DRP controller.
LOCAL/REMOTE switches.
The LO/RE lamp goes off during the "REMOTE" operation and lights up during the "LOCAL"
operation.
Furthermore, when the power is cut off, it returns to the initial state (REMOTE). However, if the power
is restored in a few seconds, the state before the cutoff is maintained.
REMOTE operation
LOCAL operation
LO/RE lamp OFF
LO/RE lamp ON