vi
YO20-0938-DI-001-00
▶
Response
(a) Transactions in Japan:
We will send a substitute product, or repair the product returned to us or our nearest ULVAC
TECHNO office.
If on-site action is required, contact our nearest sales office or dealer separately.
(b) Direct export transactions:
We will send a substitute product, or repair the product returned to us or our nearest service center.
▶
Others
(
Warranty Terms
)
(a)
If there are individual contracts and memorandum related to specifications in addition to this
document, the contents in those documents prevail.
(b)
Before exporting this pump from Japan, contact us and perform the necessary procedures
according to the provisions of export-related laws such as the Foreign Exchange and Foreign
Trade Law.
(c)
For any questions and consultation on this machine, confirm the model and manufacturing
number and then contact our nearest sales office or dealer
.
https://www.ulvac.co.jp/support_info/
(d)
Note that the contents in this document is subject to change without notice.
Summary of Contents for MS120A
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Page 47: ...33 YO20 0938 DI 001 00 Figure 16 I O block diagram for remote control wiring...
Page 65: ...51 YO20 0938 DI 001 00 7 2 External Dimensions Figure 17 External dimensions of MS120A MS120A...
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