Ulvac MS120A Instruction Manual Download

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TOC-３

YO20-0938-DI-001-00

4.4.1

How to operate monitor display

...................................................................................... 38

4.5

Parameter List

................................................................................................................................... 39

4.5.1

U3: Alarm history

................................................................................................................. 39

4.5.2

U4: Operation monitor

........................................................................................................40

Maintenance and Inspection

............................................................................ 41

5.1

Daily Inspection

................................................................................................................................. 41

5.2

Inspection after Long-Term Storage

........................................................................................... 41

5.3

Overhaul

..............................................................................................................................................42

5.4

Notes on Transportation

.................................................................................................................42

Troubleshooting

....................................................................................................43

6.1

Trouble with Basic Operation

........................................................................................................43

6.2

Alarm Status and Measures

......................................................................................................... 44

6.3

How to restart the pump after an alarm

.....................................................................................49

Specifications

........................................................................................................ 50

7.1

Performance Specifications

.......................................................................................................... 50

7.2

External Dimensions

....................................................................................................................... 51

Appendix

......................................................................................................................... 52

Major Replacement Parts

.......................................................................................................................... 52

Summary of Contents for MS120A

Page 1: ...YO20 0938 DI 001 00 Prepared on April 5 2022 INSTRUCTION MANUAL Dry Vacuum Pump ULVAC INC Components Division Original Instructions...

Page 2: ......

Page 3: ...erformance and safety may not be ensured if equipment connected to this pump does not conform to the same rules or if the pump is altered In such cases we cannot guarantee take responsibility for perf...

Page 4: ...t handling may lead to the user s death or serious injury Indicates a possibility that incorrect handling may lead to the user suffering a medium level injury Indicates important information not relat...

Page 5: ...is pump while equipment is attached that prevents gas from moving to the exhaust port e g that blocks the exhaust port The pump s internal pressure may rise causing the casing or level gauge to ruptur...

Page 6: ...iv YO20 0938 DI 001 00 Warning Label display position Figure 1 Warning label pasting position MS 120A MS120A For Installation of Silencer...

Page 7: ...s due to influence of corrosion or generated gas or product that are attributed to the process environment Failures or defects caused by consumables When the power voltage or frequency of the power su...

Page 8: ...a If there are individual contracts and memorandum related to specifications in addition to this document the contents in those documents prevail b Before exporting this pump from Japan contact us an...

Page 9: ...he end user who uses the product Copying this instruction manual in whole or in part for third parties without our permission is strictly prohibited This document is intended for users whose native la...

Page 10: ......

Page 11: ...rms vi About this Manual vii Applicable Model vii 1 For Safety Use 1 1 1 Handling of this Machine 1 1 2 Acceptance Transfer Storage 2 1 2 1 Acceptance 2 1 2 2 Transfer 3 1 2 3 Storage 3 1 3 Installati...

Page 12: ...3 3 Transfer 18 3 3 1 How to hoist using crane 19 3 3 2 How to transport using pallet truck 20 3 4 Installation 21 3 4 1 Leveling 21 3 4 2 Earthquake countermeasures 21 3 5 Piping and Wiring 23 3 5 1...

Page 13: ...41 5 1 Daily Inspection 41 5 2 Inspection after Long Term Storage 41 5 3 Overhaul 42 5 4 Notes on Transportation 42 6 Troubleshooting 43 6 1 Trouble with Basic Operation 43 6 2 Alarm Status and Measur...

Page 14: ......

Page 15: ...argon leaks the lack of oxygen may cause suffocation Before installing or removing this pump separate all energy sources including power and cooling water from it When toxic gases were pumped not only...

Page 16: ...ipment is not sufficiently maintained Never get under this machine Ask a specialist company to perform disassembly This machine comes packaged in a wooden crate cardboard box or other material Ask a s...

Page 17: ...ion may lead to burns or electrical shock Do not remove the casters Do not remove the casters and do not install this pump directly on the ground Do not apply shock to this machine or put in at an inc...

Page 18: ...r is installed then equipment burnout fire or electrical shock may occur This pump is not equipped with a power interrupter and leak detector When selecting a ground fault interrupter refer to 3 6 Ele...

Page 19: ...loading work or operate the cargo handling machine if you do not have the appropriate certifications Failure to observe this instruction may lead to accident or injury 1 6 3 Electrical shock Before co...

Page 20: ...her remove any objects that prevent gas on the exhaust port side from passing If the pump s internal pressure exceeds 0 03 MPaG the pump may rupture 1 6 6 Leakage of high temperature cooling water If...

Page 21: ...bricating oil BARRIERTA J100FLUID J100FLUID E NOK KLUBER Bearing grease NOXLUB KF1920 NOK KLUBER The SDS describes the chemical substances that may be used or touched to operate this pump To understan...

Page 22: ...Ashing equipment Plasma cleaning equipment etc Pumping system for vacuum heat treatment furnace Sintering furnace carburizing furnace etc Pumping system for manufacturing equipment of lithium batteri...

Page 23: ...9 YO20 0938 DI 001 00 2 3 Performance Curve 2 3 1 Pumping speed Figure 2 Pumping speed curve MS120A 2 3 2 Power consumption Figure 3 Power curve MS120A Applicable Standards...

Page 24: ...n valve Valve for drain exhaust Rc3 8 3 5 5 9 Exhaust port KF40 Connects the pipe that discharges the exhaust gas 3 5 1 10 Eyebolt Bolt to hoist the pump using a crane or other equipment 3 3 1 11 Inle...

Page 25: ...on this machine Refer to Table 3 Display and Status of Indicator Lamp D DRV indicator lamp Refer to Table 3 Display and Status of Indicator Lamp E LED indicator lamp Displays the number of revolution...

Page 26: ...tor lamp ON Running Blink Decelerating and stopping Short blink Operation command right was switched to REMOTE while the operation command was input from the outside in the LOCAL mode External interlo...

Page 27: ...f data display Rotation speed display Normal rotation Frequency command display Parameter setting mode Monitor display Output power display Output current display Power ON XX Description of key operat...

Page 28: ...ered by the warranty NOTES Feed valve Feed valve Drain valve Regula tor Filter Flow sensor Flow switch Pressure gauge Pressure gauge Pressure gauge Flow gauge Flow sight Flow gauge Flow meter Specifie...

Page 29: ...customer may fully or partly transport unpack or install this pump depending on the pump s terms and conditions Packing ULVAC Transport ULVAC entrust this task to a specified carrier Cargo reception a...

Page 30: ...t incline this machine by 10 degrees or more 3 1 3 Environmental requirements for installation and operation This machine is a unit with precise clearances Confirm that the following requirements are...

Page 31: ...hine when unpacking or hoisting it Do not tilt this machine 10 degrees or more Falling or other accidents may cause injury or damage For crate packing wear leather gloves and use appropriate dismantli...

Page 32: ...ve Outer ring For KF40 1 MCK 2040 OU Pressure resistant clamp For KF40 1 PJ0494 NW40 3 3 Transfer Do not use the casters as a transportation device or a means of equipment support Although this pump i...

Page 33: ...oist this machine alone When hoisting remove the dedicated silencer Hoisting with the dedicated silencer mounted may damage the parts 1 Prepare an appropriate hoisting attachment and check that the ey...

Page 34: ...e Always use a pallet when transporting via a pallet truck Do not transport this machine by pallet truck without placing it on a pallet The machine may topple causing injuries or damage Figure 9 Use o...

Page 35: ...x this machine in case of an earthquake Fig 11 Earthquake resistant fixing bracket If the machine is fixed insufficiently it may topple or move damaging the surrounding equipment Piping and wiring nee...

Page 36: ...to the center of gravity h mm 197 Weight of equipment Wp kg 142 Horizontal moment adjuster bolt Fp 0 94 Wp Fp 4 kg 33 4 There is overturning moment R when 0 94 h 0 85 L2 OK Overturning moment R Wp 0 9...

Page 37: ...port MS120A assumes the use of a horizontal inlet port When using a vertical inlet port attach a blank flange to the horizontal inlet port The blank flange for the horizontal inlet port does not come...

Page 38: ...ess gas leaks from the pump which may affect the human body In addition there is a danger that air enters the inside of the pump causing abnormal reactions ignition explosion This machine comes with a...

Page 39: ...standard quality of water supply in the Japanese industrial water works In the cooling water system of this machine water scale such as calcium carbonate settles on depending on the water quality whi...

Page 40: ...making the piping thicker or increasing the supply pressure within the specified range Use the piping with an appropriate resistant water pressure and heatproof temperature For the cooling water syste...

Page 41: ...g and degassing operation when the unit is stopped When processing be sure to perform warm up operation before processing and degassing operation when the unit is stopped each for one hour operation i...

Page 42: ...in This machine is equipped with a drain valve in the exhaust piping to prevent the liquid condensed on the exhaust side from accumulating inside the pump For positive liquid discharge of condensable...

Page 43: ...this machine Fix or cover the cables Fix the cables so that they do not come into direct contact with this machine or prepare covers cable racks Install the ground fault interrupter in a readily acces...

Page 44: ...ower capacity kVA 9 5 Pin assignment of power Figure 1 Pin assignment Pin assignment Pin No Specifications A Phase L1 R B Phase L2 S C Phase L3 T D PE GND Table 9 Receptacle connector specifications M...

Page 45: ...nstalled it will be recognized as an external interlock instruction and the pump does not start STo appears on the controller Startup Check is output when the rotation speed of the DRP is 1200 revolut...

Page 46: ...check CLOSE Running OPEN Stopped 7 N C 8 OUT Alarm CLOSE Normal OPEN Alarm 9 IN IN COM 10 N C 11 N C 12 N C 13 IN External interlock CLOSE Normal OPEN Interlock 14 IN External interlock Common 15 OUT...

Page 47: ...33 YO20 0938 DI 001 00 Figure 16 I O block diagram for remote control wiring...

Page 48: ...he exhaust port Pressure in this machine may increase which causes a rupture of or oil leakage from the casing or level gauge or overloads the electric motor This machine is not explosion proof struct...

Page 49: ...n to a decrease in amount of cooling water If the amount of cooling water is reduced it may cause failures such as rapid wear or seizing up of the components of the pump Take care that this is highly...

Page 50: ...de 4 2 2 How to switch between LOCAL manual and REMOTE remote Entering operation commands from the controller is called LOCAL Entering operation commands from a sequence of higher level devices via re...

Page 51: ...the MC on the power supply side However if necessary the frequency shall be up to once every 30 minutes 4 3 1 LOCAL operation Use with the included signal connector plugs attached How to start Press...

Page 52: ...r and follow the procedure below 1 Turn on the power The initial screen appears 2 Until Monitor display appears on the controller press or and Press The Monitor display mode appears 3 Press or and sel...

Page 53: ...revious alarm U3 12 Cumulative operating time in the event of the 2nd to last alarm Displays the cumulative operating time in the event of 2nd to last alarm U3 13 Cumulative operating time in the even...

Page 54: ...ating information of this machine use the U4 parameter Table 12 Parameter list on operation monitor No Name Function U4 01 Cumulative operating time Displays the cumulative operating time of this mach...

Page 55: ...that the floor is not wet Check the water pressure and piping Purge gas In use of purge gas Confirm that purge gas flows at the specified flow rate Check the supply pressure and piping Abnormal noise...

Page 56: ...er If details on the dangerous substances in use is not disclosed or if difficult to detoxify substances are exhausted the Service center may refuse to perform maintenance or other operations 5 4 Note...

Page 57: ...ontrol wires are not connected correctly Connect the remote control wiring correctly 3 6 2 The external interlock is not wired Hbb lights up Short circuit between pins 13 and 14 of the remote control...

Page 58: ...er flow Cool this machine once and then flush it with water 3 5 2 Pump overload Contact to ULVAC service center End of Document Faulty ventilation fan Contact to ULVAC service center End of Document A...

Page 59: ...Document Increased back pressure Clean and wash the piping on the exhaust side of the pump 3 5 1 Damage to bearing Contact to ULVAC service center End of Document High intake pressure Check the piping...

Page 60: ...inlet side for leakage etc 3 5 1 Blockage in exhaust piping Clean and wash the piping on the exhaust side of the pump 3 5 1 Not to reach the steady rotation speed The load at startup is high At start...

Page 61: ...t Indication Alarm Name Status oH oH Inverter overheating Inverter overheating was detected Cause Measures Reference Excessive ambient temperature Reduce the ambient temperature 3 1 3 Ventilation fan...

Page 62: ...ng external interlock signals An external interlock signal was input to the wiring for remote operation Cause Measures Reference An external interlock signal is input Check the external interlock cond...

Page 63: ...ions of external devices Release the contact for the external device 3 6 2 6 3 How to restart the pump after an alarm Resetting an alarm If the controller displays an alarm restart the pump after elim...

Page 64: ...0 Motor capacity 3 7 Amount of cooling water L min 4 0 Amount of purge gas 1 SLM 0 50 Maximum water vapor throughput 1 kg hr 1 5 Noise value At ultimate pressure dB A 61 Inlet port flange KF50 VG50 Ex...

Page 65: ...51 YO20 0938 DI 001 00 7 2 External Dimensions Figure 17 External dimensions of MS120A MS120A...

Page 66: ...14 Major replacement parts Category Parts Name Parts that must be replaced during an overhaul Bearing Power lock Cooling water piping ring Lubricating oil Oil seal Level gauge Check valve Parallel ke...

Page 67: ...53 YO20 0938 DI 001 00...

Page 68: ...54 YO20 0938 DI 001 00...

Page 69: ...55 YO20 0938 DI 001 00...

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Ulvac MS120A, Instruction Manual

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