Ulvac MS120A, Instruction Manual

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YO20-0938-DI-001-00
6.2 Alarm Status and Measures
Indication Alarm Name Status
CoF
（CoF）
Current offset error Motor started operation during free-running.
Cause Measures Reference
Restarted before the pump
rotation stopped completely.
After the pump stopped rotating, restart operation again. 4.3
If the alarm persists even after restarting, contact to
ULVAC service center. End of
Document
Indication Alarm Name Status
STPo
（STPo）
Step-out detection Motor step-out was detected.
Cause Measures Reference
Occurrence of power outage Check the electric wiring. 3.6.1
No cooling water flow Cool this machine once and then flush it with water. 3.5.2
Pump overload Contact to ULVAC service center.
End of
Document
Faulty ventilation fan Contact to ULVAC service center.
End of
Document
Ambient temperature is out of
the specification range
Operate at an appropriate ambient temperature. 3.1.3
Unable to rotate due to other
particles.
Contact to ULVAC service center.
End of
Document
Indication Alarm Name Status
LF
（LF）
Output open-phase
An open-phase occurred on the inverter output
side.
Cause Measures Reference
The power supply wiring is
broken. Check the power supply wiring for breaks and miss-
wiring.
➡
Install wiring correctly.
3.6.1
Motor failure Contact to ULVAC service center.
End of
Document
Inverter failure Contact to ULVAC service center.
End of
Document