Ulvac MS120A, Instruction Manual

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YO20-0938-DI-001-00
6. Troubleshooting
6.1 Trouble with Basic Operation
Table 13: Trouble with Basic Operation
Problem Cause Measures Reference
The power cannot be
turned on.
No electricity is supplied. Supply power. 4.2.1
Wrong connector wiring Install wiring correctly. 3.6.1
Electric leakage inside this
machine
Contact to ULVAC service center.
End of
Document
Nothing appears on
the controller display.
No electricity is supplied. Supply power. 4.2.1
Faulty instrumentation Contact to ULVAC service center.
End of
Document
This machine does
not start with the
controller.
Not in the LOCAL operation
mode. Press the REMOTE/LOCAL
switch.
4.2.2
The external interlock is not
wired ("Hbb" lights up). Short-circuit between pins 13 and
14 of the remote control wiring.
3.6.2
Faulty instrumentation Contact to ULVAC service center.
End of
Document
This machine does
not start by remote
control.
The remote control wires are
not connected correctly. Connect the remote control wiring
correctly.
3.6.2
The external interlock is not
wired ("Hbb" lights up). Short-circuit between pins 13 and
14 of the remote control wiring.
3.6.2
Faulty instrumentation Contact to ULVAC service center.
End of
Document
The pump generates
unusual noise.
The panel generates
vibration noise.
Contact to ULVAC service center.
End of
Document
Exhaust noise
Change to a thicker pipe. Even if
the gas is introduced in a normal
operation, resonant sound may
generate by the connected pipes
resonance.
Pump failure Contact to ULVAC service center.
End of
Document
Increase in exhaust pressure Check the exhaust pipe. 3.5.1
Leakage in the inlet pipe
Check the inlet pipe and stop the
leak.
3.5.1
Pressure does not
drop.
The mesh in the inlet port is
clogged.
Check the inlet pipe. 3.5.1
The exhaust pipe is blocked. Check the exhaust pipe. 3.5.1
Pump operating temperature
has not reached the steady
state.
After startup, warm up for about
30 minutes.The ultimate pressure
shown in the specification table is
the value directly over the pump.
7.1