Ulvac MS120A, Instruction Manual

Page: 28 / 69

14
YO20-0938-DI-001-00
2.6 System Configuration
The area surrounded by the broken line below falls within the customer's responsibility. Customers are
responsible for preparing and managing these pipes, wires, and pieces of equipment.
Figure 7: System connection diagram
The warranty covers this machine only (refer to "Warranty Scope"). Note that any
failures and damage due to piping, wiring, or equipment within the customer's
responsibility mentioned above are not covered by the warranty.
NOTES
Feed
valve
Feed
valve
Drain
valve
Regula
-tor
Filter
Flow sensor
(Flow switch)
Pressure
gauge Pressure
gauge Pressure
gauge
Flow gauge
(Flow sight)
Flow
gauge
(Flow
meter)
Specified amount of cooling water or less
➡
Shutoff
Water leakage detected
➡
Shutoff
Pump error signal
➡
Shutoff
3-phase power supply
Ground-fault interrupter
Electromagnetic
contactor (MC)
The host monitors
and shuts off
abnormalities.
Cooling water
piping outlet
Cooling water
piping inlet
パ
ー
ジガス
入口
（
L
仕様
のみ）
Pressure
gauge
Leak valve
Vacuum valve
Piping with bellows
Vacuum
Chamber
Water leakage sensor
This machine
Scope of
Customer's
Responsibility
Purge gas inlet
Signal
line
E
xh
a
u
st
p
ip
e